Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5976255 | Substrate holder for reducing non-uniform film characteristics resulting from support structures | Naoyuki Nozawa, Yoshiro Hasegawa | 1999-11-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5976255 | Substrate holder for reducing non-uniform film characteristics resulting from support structures | Naoyuki Nozawa, Yoshiro Hasegawa | 1999-11-02 |