Issued Patents All Time
Showing 1–25 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411402 | Reflective mask blank, reflective mask, and method for manufacturing semiconductor device | Yohei IKEBE | 2025-09-09 |
| 12153338 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Ryo Ohkubo | 2024-11-26 |
| 12007684 | Mask blank, method of manufacturing imprint mold, method of manufacturing transfer mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido | 2024-06-11 |
| 11762279 | Mask blank, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido | 2023-09-19 |
| 11720014 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Hiroaki Shishido | 2023-08-08 |
| 11630388 | Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido | 2023-04-18 |
| 11333966 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Yasutaka HORIGOME, Hitoshi Maeda | 2022-05-17 |
| 11281089 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido | 2022-03-22 |
| 11231645 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido | 2022-01-25 |
| 11226549 | Mask blank, phase shift mask, method for manufacturing thereof, and method for manufacturing semiconductor device | Hiroaki Shishido | 2022-01-18 |
| 11054735 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Takenori Kajiwara, Ryo Ohkubo, Hiroaki Shishido | 2021-07-06 |
| 11016382 | Mask blanks, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Atsushi Kominato | 2021-05-25 |
| 10942442 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Hiroaki Shishido, Kazuya Sakai | 2021-03-09 |
| 10942441 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Takenori Kajiwara, Hiroaki Shishido | 2021-03-09 |
| 10942440 | Mask blank, phase shift mask, method of manufacturing phase shift mask, and method of manufacturing semiconductor device | Hiroyuki Iwashita, Atsushi Matsumoto | 2021-03-09 |
| 10935881 | Mask blank, phase shift mask, phase shift mask manufacturing method, and semiconductor device manufacturing method | Takenori Kajiwara, Hiroaki Shishido | 2021-03-02 |
| 10915016 | Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido | 2021-02-09 |
| 10606164 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Takenori Kajiwara | 2020-03-31 |
| 10571797 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Ryo Ohkubo | 2020-02-25 |
| 10551734 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Takenori Kajiwara | 2020-02-04 |
| 10551733 | Mask blanks, phase shift mask, and method for manufacturing semiconductor device | Atsushi Kominato | 2020-02-04 |
| 10539866 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Hiroaki Shishido, Kazuya Sakai | 2020-01-21 |
| 10527931 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido, Yasushi Okubo | 2020-01-07 |
| 10481485 | Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device | Takenori Kajiwara, Ryo Ohkubo | 2019-11-19 |
| 10481486 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Takenori Kajiwara, Hiroaki Shishido | 2019-11-19 |