Issued Patents All Time
Showing 26–50 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365555 | Mask blank, transfer mask and methods of manufacturing the same | Hiroaki Shishido, Ryo Ohkubo | 2019-07-30 |
| 10365556 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido | 2019-07-30 |
| 10261409 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido | 2019-04-16 |
| 10146123 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Takenori Kajiwara | 2018-12-04 |
| 10114281 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Takenori Kajiwara | 2018-10-30 |
| 10101650 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido, Yasushi Okubo | 2018-10-16 |
| 10088744 | Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device | Hiroaki Shishido, Takashi Uchida | 2018-10-02 |
| 9939723 | Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device | Hiroaki Shishido, Takashi Uchida | 2018-04-10 |
| 9864268 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido | 2018-01-09 |
| 9726972 | Mask blank, transfer mask, and method for manufacturing transfer mask | Hiroaki Shishido, Ryo Ohkubo | 2017-08-08 |
| 9664997 | Method of manufacturing mask blank and method of manufacturing transfer mask | Atsushi Kominato, Hiroaki Shishido | 2017-05-30 |
| 9651859 | Mask blank, transfer mask and method of manufacturing transfer mask | Masahiro Hashimoto, Atsushi Kominato, Hiroyuki Iwashita | 2017-05-16 |
| 9625806 | Mask blank, phase-shift mask, and method for manufacturing the same | Hiroaki Shishido, Kazuya Sakai | 2017-04-18 |
| 9625805 | Reflective mask blank, reflective mask and method of manufacturing reflective mask | Kazuya Sakai, Ryo Ohkubo, Toshiyuki Suzuki | 2017-04-18 |
| 9625807 | Mask blank, transfer mask, method of manufacturing a mask blank, method of manufacturing a transfer mask and method of manufacturing a semiconductor device | Hiroaki Shishido, Atsushi Kominato, Toshiharu Kikuchi | 2017-04-18 |
| 9612527 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Masahiro Hashimoto | 2017-04-04 |
| 9436079 | Phase shift mask blank, method of manufacturing the same, and phase shift mask | Hiroaki Shishido, Kazuya Sakai | 2016-09-06 |
| 9372393 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Hiroyuki Iwashita, Masahiro Hashimoto | 2016-06-21 |
| 9354509 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Noriyuki SAKAYA | 2016-05-31 |
| 9256122 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Masahiro Hashimoto | 2016-02-09 |
| 9195133 | Mask blank, transfer mask and method of manufacturing transfer mask | Masahiro Hashimoto, Atsushi Kominato, Hiroyuki Iwashita | 2015-11-24 |
| 9140980 | Method of manufacturing a transfer mask and method of manufacturing a semiconductor device | Hiroaki Shishido, Toshiyuki Suzuki | 2015-09-22 |
| 9075319 | Mask blank and transfer mask | Masahiro Hashimoto, Hiroyuki Iwashita, Yasushi Okubo | 2015-07-07 |
| 9075315 | Reflective mask blank, reflective mask and method of manufacturing reflective mask | Kazuya Sakai, Ryo Ohkubo, Toshiyuki Suzuki | 2015-07-07 |
| 9029048 | Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device | Kazuya Sakai, Ryo Ohkubo, Toshiyuki Suzuki | 2015-05-12 |