Issued Patents All Time
Showing 51–75 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9017902 | Mask blank, transfer mask, and method of manufacturing a transfer mask | Hiroyuki Iwashita, Masahiro Hashimoto, Atsushi Kominato | 2015-04-28 |
| 8999609 | Phase shift mask blank, method of manufacturing the same, and phase shift mask | Hiroaki Shishido, Kazuya Sakai | 2015-04-07 |
| 8883022 | Mask blank and method of manufacturing an imprinting mold | Masahiro Hashimoto | 2014-11-11 |
| 8846274 | Mask blank, transfer mask and process for manufacturing semiconductor devices | Hiroaki Shishido, Atsushi Kominato | 2014-09-30 |
| 8822103 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Hiroyuki Iwashita, Masahiro Hashimoto | 2014-09-02 |
| 8715892 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Noriyuki SAKAYA | 2014-05-06 |
| 8709681 | Mask blank, transfer mask, and film denseness evaluation method | Kazuya Sakai | 2014-04-29 |
| 8637213 | Mask blank and transfer mask | Masahiro Hashimoto, Atsushi Kominato, Hiroyuki Iwashita | 2014-01-28 |
| 8614035 | Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank | Masahiro Hashimoto | 2013-12-24 |
| 8580466 | Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film | Yuki Shiota | 2013-11-12 |
| 8524421 | Mask blank, transfer mask, methods of manufacturing the same and method of manufacturing a semiconductor device | Hiroaki Shishido, Toshiyuki Suzuki | 2013-09-03 |
| 8518609 | Photomask blank, photomask, and photomask manufacturing method | — | 2013-08-27 |
| 8501372 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Masahiro Hashimoto | 2013-08-06 |
| 8486588 | Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film | Yuki Shiota | 2013-07-16 |
| 8435704 | Mask blank, transfer mask, and methods of manufacturing the same | Hiroaki Shishido | 2013-05-07 |
| 8354205 | Mask blank, transfer mask, and methods of manufacturing the same | — | 2013-01-15 |
| 8293435 | Photomask blank, photomask, and methods of manufacturing the same | — | 2012-10-23 |
| 8283092 | Photomask blank, photomask, and photomask manufacturing method | — | 2012-10-09 |
| 8268515 | Mask blank and method of manufacturing a transfer mask | — | 2012-09-18 |
| 8216747 | Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank | Masahiro Hashimoto | 2012-07-10 |
| 8137867 | Photomask blank, photomask, and methods of manufacturing the same | — | 2012-03-20 |
| 8137868 | Photomask blank, photomask, and methods of manufacturing the same | — | 2012-03-20 |
| 8110323 | Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film | Yuki Shiota | 2012-02-07 |
| 8012314 | Manufacturing method and apparatus of phase shift mask blank | Hideaki Mitsui | 2011-09-06 |
| 7989122 | Photomask blank, photomask, and methods of manufacturing the same | — | 2011-08-02 |