Issued Patents All Time
Showing 76–100 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955762 | Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film | Yuki Shiota | 2011-06-07 |
| 7935461 | Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank | Masahiro Hashimoto | 2011-05-03 |
| 7862963 | Halftone type phase shift mask blank and phase shift mask thereof | Yuuki Shiota, Hideaki Mitsui | 2011-01-04 |
| 7838180 | Mask blank, method of manufacturing an exposure mask, and method of manufacturing an imprint template | Mitsuhiro Kureishi | 2010-11-23 |
| 7651823 | Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film | Yuki Shiota | 2010-01-26 |
| 7632612 | Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same | Yuuki Shiota, Ryo Ohkubo, Hideaki Mitsui | 2009-12-15 |
| 7592106 | Halftone type phase shift mask blank and phase shift mask thereof | Yuuki Shiota, Hideaki Mitsui | 2009-09-22 |
| 7402228 | Manufacturing method and apparatus of phase shift mask blank | Hideaki Mitsui | 2008-07-22 |
| 7282121 | Manufacturing method and apparatus of phase shift mask blank | Hideaki Mitsui | 2007-10-16 |
| 7169513 | Halftone type phase shift mask blank and phase shift mask thereof | Yuuki Shiota, Hideaki Mitsui | 2007-01-30 |
| 7115341 | Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same | Yuuki Shiota, Ryo Ohkubo, Hideaki Mitsui | 2006-10-03 |
| 7060394 | Halftone phase-shift mask blank and halftone phase-shift mask | Yuki Shiota, Hideaki Mitsui | 2006-06-13 |
| 7011910 | Halftone-type phase-shift mask blank, and halftone-type phase-shift mask | Yuki Shiota, Hideaki Mitsui, Ryo Ohkubo | 2006-03-14 |
| 6844119 | Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask | Hideaki Mitsui, Laurent Dieu | 2005-01-18 |
| 6783634 | Manufacturing method and apparatus of phase shift mask blank | Hideaki Mitsui | 2004-08-31 |
| 6762000 | Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks | Masaru Mitsui, Hitoshi Ootsuka, Hideaki Mitsui | 2004-07-13 |
| 6746806 | Lithography mask blank and method of manufacturing the same | — | 2004-06-08 |
| 6743553 | Halftone phase shift mask and mask blank | Yuki Shiota | 2004-06-01 |
| 6740208 | Photo mask blank and method of manufacturing the same | Mitsuhiro Kureishi | 2004-05-25 |
| 6723477 | Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask | Masaru Mitsui, Hideaki Mitsui | 2004-04-20 |
| 6677087 | Phase shift mask blank, phase shift mask, and method for manufacturing the same | Hideaki Mitsui | 2004-01-13 |
| 6395434 | Phase shift mask and phase shift mask blank | Hideaki Mitsui, Megumi Takeuchi | 2002-05-28 |
| 6335124 | Phase shift mask and phase shift mask blank | Hideaki Mitsui, Megumi Takeuchi | 2002-01-01 |
| 6287429 | Magnetic recording medium having an improved magnetic characteristic | Keiji Moroishi, Junichi Horikawa, Masato Kobayashi | 2001-09-11 |
| 6087047 | Phase shift mask and phase shift mask blank | Hideaki Mitsui, Megumi Takeuchi | 2000-07-11 |