Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7862963 | Halftone type phase shift mask blank and phase shift mask thereof | Osamu Nozawa, Hideaki Mitsui | 2011-01-04 |
| 7632612 | Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same | Osamu Nozawa, Ryo Ohkubo, Hideaki Mitsui | 2009-12-15 |
| 7592106 | Halftone type phase shift mask blank and phase shift mask thereof | Osamu Nozawa, Hideaki Mitsui | 2009-09-22 |
| 7169513 | Halftone type phase shift mask blank and phase shift mask thereof | Osamu Nozawa, Hideaki Mitsui | 2007-01-30 |
| 7115341 | Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same | Osamu Nozawa, Ryo Ohkubo, Hideaki Mitsui | 2006-10-03 |