Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7101645 | Reflective mask for short wavelength lithography | Bruno La Fontaine | 2006-09-05 |
| 7056623 | Photomask and method for manufacturing the same | Franklin D. Kalk | 2006-06-06 |
| 6844119 | Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask | Osamu Nozawa, Hideaki Mitsui | 2005-01-18 |
| 6756161 | Ion-beam deposition process for manufacture of binary photomask blanks | Peter Francis Carcia | 2004-06-29 |