Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7271950 | Apparatus and method for optimizing a pellicle for off-axis transmission of light | Joseph Gordon, Gregory P. Hughes, Hakki Ufuk Alpay | 2007-09-18 |
| 7056623 | Photomask and method for manufacturing the same | Laurent Dieu | 2006-06-06 |
| 6911283 | Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism | Joseph Gordon, Gregory P. Hughes, Hakki Ufuk Alpay, Glenn E. Storm | 2005-06-28 |
| 6841309 | Damage resistant photomask construction | H. Ufuk Alpay, Joseph Gordon, Gregory P. Hughes | 2005-01-11 |
| 6841312 | Method and apparatus for coupling a pellicle assembly to a photomask | — | 2005-01-11 |
| 6803160 | Multi-tone photomask and method for manufacturing the same | Eric Johnstone | 2004-10-12 |
| 6803158 | Photomask and method for forming an opaque border on the same | Joseph Gordon, Gregory P. Hughes, Hakki Ufuk Alpay | 2004-10-12 |
| 6780548 | Alternating aperture phase shifting photomask with improved transmission balancing | — | 2004-08-24 |
| 6759171 | Alternating aperture phase shifting photomask with improved intensity balancing | — | 2004-07-06 |
| 6721695 | Method and apparatus for evaluating the runability of a photomask inspection tool | Xiaoming Chen, Charles H. Howard, Kong Son, Paul Chipman | 2004-04-13 |
| 6482557 | Method and apparatus for evaluating the runability of a photomask inspection tool | Xiaoming Chen, Charles H. Howard, Kong Son, Paul Chipman | 2002-11-19 |
| 5459002 | Photomask blanks | Hakki Ufuk Alpay, Roger Harquail French | 1995-10-17 |
| 5415953 | Photomask blanks comprising transmissive embedded phase shifter | Hakki Ufuk Alpay, Roger Harquail French | 1995-05-16 |
| 4857373 | Optical recording element | Peter Francis Carcia | 1989-08-15 |
| 4600682 | Optical storage structure | Fred W. Spong, Boris J. Muchnik | 1986-07-15 |
| 4556968 | Unconstrained removable protective cover for optical disk | Kathleen Pelkey | 1985-12-03 |
| 4480302 | Optical recording media | Boris J. Muchnik, Doyle W. Johnston, Fred W. Spong | 1984-10-30 |
| 4381963 | Micro fabrication molding process | Irving S. Goldstein, Harry W. Deckman | 1983-05-03 |