Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7271950 | Apparatus and method for optimizing a pellicle for off-axis transmission of light | Joseph Gordon, Gregory P. Hughes, Franklin D. Kalk | 2007-09-18 |
| 6911283 | Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism | Joseph Gordon, Gregory P. Hughes, Franklin D. Kalk, Glenn E. Storm | 2005-06-28 |
| 6803158 | Photomask and method for forming an opaque border on the same | Joseph Gordon, Gregory P. Hughes, Franklin D. Kalk | 2004-10-12 |
| 6797439 | Photomask with back-side anti-reflective layer and method of manufacture | — | 2004-09-28 |
| 5459002 | Photomask blanks | Roger Harquail French, Franklin D. Kalk | 1995-10-17 |
| 5415953 | Photomask blanks comprising transmissive embedded phase shifter | Roger Harquail French, Franklin D. Kalk | 1995-05-16 |
| 5230971 | Photomask blank and process for making a photomask blank using gradual compositional transition between strata | — | 1993-07-27 |