Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911283 | Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism | Joseph Gordon, Gregory P. Hughes, Franklin D. Kalk, Hakki Ufuk Alpay | 2005-06-28 |
| 6894766 | Method for constructing a photomask assembly using an encoded mark | Craig West, Susan S. MacDonald, Joseph Gordon, James Carroll | 2005-05-17 |
| 6833222 | Method and apparatus for trimming a pellicle film using a laser | John E. Buzerak, Greg A. Fariss | 2004-12-21 |
| 6103427 | Pressure relieving pellicle | — | 2000-08-15 |