Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6720114 | METHOD OF FORMING AN ALTERNATING PHASE SHIFT CIRCUITRY FABRICATION MASK, METHOD OF FORMING A CIRCUITRY FABRICATION MASK HAVING A SUBTRACTIVE ALTERNATING PHASE SHIFT REGION, AND ALTERNATING PHASE SHIFT MASK | Amy A. Winder | 2004-04-13 |
| 6721695 | Method and apparatus for evaluating the runability of a photomask inspection tool | Xiaoming Chen, Charles H. Howard, Franklin D. Kalk, Kong Son | 2004-04-13 |
| 6482557 | Method and apparatus for evaluating the runability of a photomask inspection tool | Xiaoming Chen, Charles H. Howard, Franklin D. Kalk, Kong Son | 2002-11-19 |