Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411402 | Reflective mask blank, reflective mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2025-09-09 |
| 12228852 | Reflective mask blank, reflective mask and method for manufacturing a semiconductor device | — | 2025-02-18 |
| 12135496 | Reflective mask blank and reflective mask | Tsutomu Shoki, Takahiro Onoue, Hirofumi Kozakai | 2024-11-05 |
| 12111566 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Tsutomu Shoki | 2024-10-08 |
| 12105413 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Tsutomu Shoki | 2024-10-01 |
| 11914281 | Reflective mask blank, reflective mask, and method for manufacturing semiconductor device | — | 2024-02-27 |
| 11892768 | Reflective mask blank, reflective mask and method of manufacturing the same, and method of manufacturing semiconductor device | Mizuki KATAOKA | 2024-02-06 |
| 11880130 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki, Takahiro Onoue, Hirofumi Kozakai | 2024-01-23 |
| 11815806 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Tsutomu Shoki | 2023-11-14 |
| 11815807 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Tsutomu Shoki | 2023-11-14 |
| 11550215 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Tsutomu Shoki | 2023-01-10 |
| 11531264 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Tsutomu Shoki | 2022-12-20 |
| 11480867 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki, Takahiro Onoue, Hirofumi Kozakai | 2022-10-25 |
| 11281090 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tsutomu Shoki | 2022-03-22 |
| 11249385 | Reflective mask blank, reflective mask, method of manufacturing same, and method of manufacturing semiconductor device | Tsutomu Shoki | 2022-02-15 |
| 11237472 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Junichi Horikawa, Takahiro Onoue, Mizuki KATAOKA | 2022-02-01 |
| 11187972 | Reflective mask blank, method of manufacturing reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki | 2021-11-30 |
| 11131921 | Method for manufacturing reflective mask blank, and method for manufacturing reflective mask | Tsutomu Shoki, Kazuhiro Hamamoto | 2021-09-28 |
| 11003068 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki, Takahiro Onoue, Hirofumi Kozakai | 2021-05-11 |
| 10921705 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki | 2021-02-16 |
| 10871707 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | — | 2020-12-22 |
| 10642149 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto | 2020-05-05 |
| 10578961 | Mask blank substrate, multi-layer reflective film coated substrate, and mask blank | Masaru Tanabe | 2020-03-03 |
| 10481484 | Reflective mask blank, reflective mask, method for manufacturing reflective mask blank, and method for manufacturing semiconductor device | Takahiro Onoue, Tsutomu Shoki | 2019-11-19 |
| 10394113 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto | 2019-08-27 |