Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11892768 | Reflective mask blank, reflective mask and method of manufacturing the same, and method of manufacturing semiconductor device | Yohei IKEBE | 2024-02-06 |
| 11237472 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Yohei IKEBE, Junichi Horikawa, Takahiro Onoue | 2022-02-01 |