Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10067419 | Method for manufacturing reflective mask blank, and method for manufacturing reflective mask | Tsutomu Shoki, Kazuhiro Hamamoto | 2018-09-04 |
| 9864267 | Reflective mask blank, reflective mask, and method for manufacturing semiconductor device | Takahiro Onoue, Tsutomu Shoki | 2018-01-09 |