Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8802334 | Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a mask | Takeyuki Yamada, Toshiyuki Suzuki, Masahiro Hashimoto | 2014-08-12 |
| 7713663 | Mask blank, manufacturing method of mask blank, manufacturing method of transfer mask and manufacturing method of semiconductor device | Yasushi Okubo | 2010-05-11 |
| 5723237 | Method for determining baking conditions for resist pattern formation through development of unexposed trial resist films | Hideo Kobayashi, Keishi Asakawa | 1998-03-03 |