Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10712652 | Mask blank having a resist layer, method for manufacturing mask blank having resist layer, and method for manufacturing transfer mask | Hiroaki Shishido, Seishi SHIBAYAMA | 2020-07-14 |
| 10042247 | Mask blank, method for manufacturing mask blank and transfer mask | Masahiro Hashimoto, Yasushi Sakaida, Ryuta MIZUOCHI, Rikimaru Sakamoto, Masaki Nagai | 2018-08-07 |
| 9927697 | Mask blank, method of manufacturing mask blank and method of manufacturing transfer mask | Masahiro Hashimoto | 2018-03-27 |
| 9746764 | Mask blank and transfer mask | Masahiro Hashimoto, Yasushi Sakaida, Ryuta MIZUOCHI, Rikimaru Sakamoto, Masaki Nagai | 2017-08-29 |
| 8409772 | Mask blank and method of manufacturing a transfer mask | Masahiro Hashimoto, Hiroyuki Iwashita | 2013-04-02 |