Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131928 | Resist underlayer film forming composition which contains compound having glycoluril skeleton as additive | Yuki Usui, Takahiro Kishioka, Hiroto OGATA | 2021-09-28 |
| 11112696 | Protective film-forming composition | Yuto HASHIMOTO, Hikaru TOKUNAGA, Hiroto OGATA, Tomoya Ohashi, Takahiro Kishioka | 2021-09-07 |
| 11003078 | Compositions for forming a protective film against basic aqueous hydrogen peroxide solution, and pattern formation method | Tomoya Ohashi, Hiroto OGATA, Yuto HASHIMOTO, Yuki Usui, Takahiro Kishioka | 2021-05-11 |
| 10684546 | Composition for forming resist underlayer film | Kenji Takase, Takahiro Kishioka, Rikimaru Sakamoto | 2020-06-16 |
| 10509320 | Underlying coating forming composition for lithography containing compound having protected carboxyl group | Satoshi Takei, Tetsuya Shinjo, Keisuke Hashimoto | 2019-12-17 |
| 10289002 | Electron beam resist underlayer film-forming composition containing lactone-structure-containing polymer | Ryuta MIZUOCHI, Rikimaru Sakamoto | 2019-05-14 |
| 10113083 | Resist underlayer film-forming composition containing polymer which contains nitrogen-containing ring compound | Ryuji Ohnishi, Ryuta MIZUOCHI, Tokio NISHITA, Rikimaru Sakamoto | 2018-10-30 |
| 10067423 | Additive and resist underlayer film-forming composition containing the same | Yuto HASHIMOTO, Kenji Takase, Rikimaru Sakamoto | 2018-09-04 |
| 10042247 | Mask blank, method for manufacturing mask blank and transfer mask | Takahiro Hiromatsu, Masahiro Hashimoto, Ryuta MIZUOCHI, Rikimaru Sakamoto, Masaki Nagai | 2018-08-07 |
| 10025191 | Polymer-containing coating liquid applied to resist pattern | Shuhei Shigaki, Rikimaru Sakamoto | 2018-07-17 |
| 9910354 | Resist underlayer film-forming composition and method for forming resist pattern using the same | Tokio NISHITA, Noriaki Fujitani, Rikimaru Sakamoto | 2018-03-06 |
| 9753369 | Polymer-containing developer | Rikimaru Sakamoto, Bangching Ho | 2017-09-05 |
| 9746764 | Mask blank and transfer mask | Takahiro Hiromatsu, Masahiro Hashimoto, Ryuta MIZUOCHI, Rikimaru Sakamoto, Masaki Nagai | 2017-08-29 |
| 9632414 | Coating liquid to be applied to resist pattern and method for forming reverse pattern | Rikimaru Sakamoto, Shuhei Shigaki | 2017-04-25 |
| 9165781 | Composition for forming pattern reversal film and method for forming reversal pattern | Hiroaki Yaguchi | 2015-10-20 |
| 9093279 | Thin film forming composition for lithography containing titanium and silicon | Makoto Nakajima, Yuta Kanno, Satoshi Takeda, Shuhei Shigaki | 2015-07-28 |
| 8916327 | Underlayer coating forming composition containing dextrin ester compound | Satoshi Takei, Tetsuya Shinjo | 2014-12-23 |
| 8822138 | Composition for forming resist underlayer film for lithography including resin containing alicyclic ring and aromatic ring | Tetsuya Shinjo, Hirokazu Nishimaki, Keisuke Hashimoto | 2014-09-02 |
| 8658341 | Pattern reversal film forming composition and method of forming reversed pattern | Daisuke Maruyama, Hiroaki Yaguchi | 2014-02-25 |
| 8283103 | Composition for forming resist underlayer film for lithography and production method of semiconductor device | Hikaru Imamura, Makoto Nakajima, Satoshi Takei | 2012-10-09 |
| 8007979 | Acrylic polymer-containing gap fill material forming composition for lithography | Satoshi Takei, Kazuhisa Ishii, Takahiro Kishioka | 2011-08-30 |
| 7842620 | Method for manufacturing semiconductor device using quadruple-layer laminate | Satoshi Takei, Makoto Nakajima, Hikaru Imamura, Keisuke Hashimoto, Takahiro Kishioka | 2010-11-30 |
| 7727902 | Composition for forming nitride coating film for hard mask | Satoshi Takei | 2010-06-01 |
| 7365023 | Porous underlayer coating and underlayer coating forming composition for forming porous underlayer coating | Satoshi Takei | 2008-04-29 |
| 7226721 | Underlayer coating forming composition for lithography containing compound having protected carboxyl group | Satoshi Takei, Takahiro Kishioka, Tetsuya Shinjo | 2007-06-05 |