Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12084592 | Coating composition for pattern inversion | Makoto Nakajima, Yuki Endo, Wataru SHIBAYAMA, Shuhei Shigaki | 2024-09-10 |
| 11884839 | Acetal-protected silanol group-containing polysiloxane composition | Yuki Endo, Makoto Nakajima | 2024-01-30 |
| 11609499 | Silicon-containing coating agent for pattern reversal | Shuhei Shigaki, Makoto Nakajima | 2023-03-21 |
| 11268894 | Flow cell and particle measuring device | Yuki Yamakawa, Masaki Shimmura, Tomonobu Matsuda | 2022-03-08 |
| 10910220 | Planarization method for a semiconductor substrate using a silicon-containing composition | Shuhei Shigaki, Makoto Nakajima | 2021-02-02 |
| 10558119 | Composition for coating resist pattern | Wataru SHIBAYAMA, Makoto Nakajima, Shuhei Shigaki, Rikimaru Sakamoto | 2020-02-11 |
| 10508174 | Silicon-containing coating agent for reversing planarization pattern | Shuhei Shigaki, Makoto Nakajima | 2019-12-17 |
| 10139729 | Coating composition for pattern reversal on soc pattern | Makoto Nakajima, Wataru SHIBAYAMA, Satoshi Takeda, Hiroyuki Wakayama, Rikimaru Sakamoto | 2018-11-27 |
| 9627217 | Silicon-containing EUV resist underlayer film-forming composition including additive | Shuhei Shigaki, Wataru SHIBAYAMA, Rikimaru Sakamoto, Bangching Ho | 2017-04-18 |
| 9337052 | Silicon-containing EUV resist underlayer film forming composition | Shuhei Shigaki, Rikimaru Sakamoto, Bang-Ching Ho | 2016-05-10 |
| 9165781 | Composition for forming pattern reversal film and method for forming reversal pattern | Yasushi Sakaida | 2015-10-20 |
| 8658341 | Pattern reversal film forming composition and method of forming reversed pattern | Daisuke Maruyama, Yasushi Sakaida | 2014-02-25 |