Issued Patents All Time
Showing 51–75 of 89 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9140980 | Method of manufacturing a transfer mask and method of manufacturing a semiconductor device | Osamu Nozawa, Toshiyuki Suzuki | 2015-09-22 |
| 9075314 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Atsushi Kominato, Masahiro Hashimoto, Morio Hosoya | 2015-07-07 |
| 9005851 | Phase shift mask blank and phase shift mask | Hiroyuki Iwashita, Atsushi Kominato, Masahiro Hashimoto | 2015-04-14 |
| 8999609 | Phase shift mask blank, method of manufacturing the same, and phase shift mask | Osamu Nozawa, Kazuya Sakai | 2015-04-07 |
| 8865378 | Photomask blank, photomask, and methods of manufacturing the same | Hiroyuki Iwashita, Atsushi Kominato, Masahiro Hashimoto | 2014-10-21 |
| 8846274 | Mask blank, transfer mask and process for manufacturing semiconductor devices | Osamu Nozawa, Atsushi Kominato | 2014-09-30 |
| 8553214 | Method and equipment for detecting pattern defect | Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2013-10-08 |
| 8524421 | Mask blank, transfer mask, methods of manufacturing the same and method of manufacturing a semiconductor device | Osamu Nozawa, Toshiyuki Suzuki | 2013-09-03 |
| 8512916 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Atsushi Kominato, Masahiro Hashimoto, Morio Hosoya | 2013-08-20 |
| 8507155 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Atsushi Kominato, Masahiro Hashimoto | 2013-08-13 |
| 8435704 | Mask blank, transfer mask, and methods of manufacturing the same | Osamu Nozawa | 2013-05-07 |
| 8431290 | Photomask blank, photomask, and methods of manufacturing the same | Hiroyuki Iwashita, Atsushi Kominato, Masahiro Hashimoto | 2013-04-30 |
| 8404406 | Photomask blank and method for manufacturing the same | Hiroyuki Iwashita, Atsushi Kominato, Masahiro Hashimoto | 2013-03-26 |
| 8329364 | Phase shift mask blank and phase shift mask | Hiroyuki Iwashita, Atsushi Kominato, Masahiro Hashimoto | 2012-12-11 |
| 8304147 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Atsushi Kominato, Masahiro Hashimoto | 2012-11-06 |
| 7791725 | Method and equipment for detecting pattern defect | Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2010-09-07 |
| 7573109 | Semiconductor device | Shinji Kunori, Masato Mikawa, Kosuke Ohshima, Masahiro Kuriyama, Mizue Kitada | 2009-08-11 |
| 7456963 | Method and equipment for detecting pattern defect | Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2008-11-25 |
| 7365391 | Semiconductor device and method for manufacturing thereof | Toru Kurosaki, Shinji Kunori, Mizue Kitada, Kosuke Ohshima, Masato Mikawa | 2008-04-29 |
| 7282764 | Semiconductor device | Shinji Kunori, Masato Mikawa, Kosuke Ohshima, Masahiro Kuriyama, Mizue Kitada | 2007-10-16 |
| 7251024 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2007-07-31 |
| 7208375 | Semiconductor device | Toru Kurosaki, Mizue Kitada, Shinji Kunori, Kosuke Ohshima | 2007-04-24 |
| 7196376 | Trench-type power MOSFET with embedded region at the bottom of the gate and increased breakdown voltage | Toru Kurosaki, Shinji Kunori, Mizue Kitada, Kosuke Ohshima | 2007-03-27 |
| 7132669 | Method and equipment for detecting pattern defect | Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2006-11-07 |
| 6921905 | Method and equipment for detecting pattern defect | Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2005-07-26 |