Issued Patents All Time
Showing 26–50 of 89 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10712655 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Yasutaka HORIGOME | 2020-07-14 |
| 10712652 | Mask blank having a resist layer, method for manufacturing mask blank having resist layer, and method for manufacturing transfer mask | Takahiro Hiromatsu, Seishi SHIBAYAMA | 2020-07-14 |
| 10606164 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2020-03-31 |
| 10571797 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2020-02-25 |
| 10551734 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2020-02-04 |
| 10539866 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Kazuya Sakai | 2020-01-21 |
| 10527931 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo, Yasushi Okubo | 2020-01-07 |
| 10481486 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2019-11-19 |
| 10444620 | Mask blank, phase-shift mask and method for manufacturing semiconductor device | Atsushi Matsumoto, Takashi Uchida | 2019-10-15 |
| 10365555 | Mask blank, transfer mask and methods of manufacturing the same | Osamu Nozawa, Ryo Ohkubo | 2019-07-30 |
| 10365556 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2019-07-30 |
| 10261409 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2019-04-16 |
| 10180622 | Mask blank, phase-shift mask, method of manufacturing mask blank, method of manufacturing phase-shift mask and method of manufacturing semiconductor device | Kazuya Sakai | 2019-01-15 |
| 10146123 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2018-12-04 |
| 10114281 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2018-10-30 |
| 10101650 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo, Yasushi Okubo | 2018-10-16 |
| 10088744 | Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Takashi Uchida | 2018-10-02 |
| 9939723 | Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Takashi Uchida | 2018-04-10 |
| 9933698 | Mask blank, phase-shift mask and method for manufacturing semiconductor device | Atsushi Matsumoto, Takashi Uchida | 2018-04-03 |
| 9864268 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2018-01-09 |
| 9726972 | Mask blank, transfer mask, and method for manufacturing transfer mask | Ryo Ohkubo, Osamu Nozawa | 2017-08-08 |
| 9664997 | Method of manufacturing mask blank and method of manufacturing transfer mask | Atsushi Kominato, Osamu Nozawa | 2017-05-30 |
| 9625806 | Mask blank, phase-shift mask, and method for manufacturing the same | Osamu Nozawa, Kazuya Sakai | 2017-04-18 |
| 9625807 | Mask blank, transfer mask, method of manufacturing a mask blank, method of manufacturing a transfer mask and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa, Toshiharu Kikuchi | 2017-04-18 |
| 9436079 | Phase shift mask blank, method of manufacturing the same, and phase shift mask | Osamu Nozawa, Kazuya Sakai | 2016-09-06 |