Issued Patents All Time
Showing 76–89 of 89 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6906355 | Semiconductor device | Toru Kurosaki, Mizue Kitada, Shinji Kunori, Kosuke Ohshima | 2005-06-14 |
| 6876034 | Semiconductor device having active grooves | Toru Kurosaki, Mizue Kitada, Shinji Kunori, Kosuke Ohshima | 2005-04-05 |
| 6841825 | Semiconductor device | Toru Kurosaki, Mizue Kitada, Shinji Kunori, Kosuke Ohshima | 2005-01-11 |
| 6819416 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2004-11-16 |
| 6800859 | Method and equipment for detecting pattern defect | Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2004-10-05 |
| 6621571 | Method and apparatus for inspecting defects in a patterned specimen | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Toshihiko Nakata, Minoru Yoshida +1 more | 2003-09-16 |
| 6556290 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2003-04-29 |
| 6084664 | Method of and apparatus for inspecting reticle for defects | Shunichi Matsumoto | 2000-07-04 |
| 6064477 | Method of and apparatus for inspecting reticle for defects | Shunichi Matsumoto | 2000-05-16 |
| 5539514 | Foreign particle inspection apparatus and method with front and back illumination | Shunichi Matsumoto | 1996-07-23 |
| 5410400 | Foreign particle inspection apparatus | Minori Noguchi | 1995-04-25 |
| 5098191 | Method of inspecting reticles and apparatus therefor | Minori Noguchi, Mitsuyoshi Koizumi, Nobuyuki Akiyama, Toshihilo Nakata | 1992-03-24 |
| 4952058 | Method and apparatus for detecting abnormal patterns | Minori Noguchi, Mitsuyoshi Koizumi | 1990-08-28 |
| 4922308 | Method of and apparatus for detecting foreign substance | Minori Noguchi, Mitsuyoshi Koizumi, Sachio Uto, Yoshimasa Ohshima | 1990-05-01 |