Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8227265 | Method of measuring pattern shape, method of manufacturing semiconductor device, and process control system | Shunichi Matsumoto, Yasuhiro Yoshitake | 2012-07-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8227265 | Method of measuring pattern shape, method of manufacturing semiconductor device, and process control system | Shunichi Matsumoto, Yasuhiro Yoshitake | 2012-07-24 |