Issued Patents All Time
Showing 26–50 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7791725 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2010-09-07 |
| 7643140 | Method and apparatus for inspecting a semiconductor device | Taketo Ueno | 2010-01-05 |
| 7612889 | Method and apparatus for measuring displacement of a sample | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba, Mineo Nomoto | 2009-11-03 |
| 7599076 | Method for optically detecting height of a specimen and charged particle beam apparatus using the same | Keiya Saito, Masahiro Watanabe | 2009-10-06 |
| 7456963 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2008-11-25 |
| 7449689 | Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method | Wataru Nagatomo, Ryoichi Matsuoka, Takumichi Sutani, Akiyuki Sugiyama, Hideaki Sasazawa | 2008-11-11 |
| 7273685 | Method for controlling semiconductor device production process and a method for producing semiconductor devices | Hideaki Sasazawa | 2007-09-25 |
| 7132669 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2006-11-07 |
| 6921905 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2005-07-26 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Chie Shishido, Yuji Takagi, Masahiro Watanabe, Shunichi Matsumoto, Takashi Iizumi +3 more | 2005-06-21 |
| 6869807 | Method and its apparatus for manufacturing semiconductor device | Kenji Tamaki, Masahiro Watanabe | 2005-03-22 |
| 6841321 | Method and system for processing a semi-conductor device | Shunichi Matsumoto, Yoshiyuki Miyamoto | 2005-01-11 |
| 6800859 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2004-10-05 |
| 6801827 | Overlay inspection apparatus for semiconductor substrate and method thereof | Shunichi Matsumoto, Toshiharu Miwa | 2004-10-05 |
| 6757621 | Process management system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Terushige Asakawa, Yuichi Ohyama +12 more | 2004-06-29 |
| 6720117 | Exposure mask with appended mask error data | Shunichi Matsumoto, Takeshi Kato, Norio Hasegawa | 2004-04-13 |
| 6721940 | Exposure processing method and exposure system for the same | Toshiharu Miwa, Tetsuya Yamazaki | 2004-04-13 |
| 6697698 | Overlay inspection apparatus for semiconductor substrate and method thereof | Shunichi Matsumoto, Toshiharu Miwa | 2004-02-24 |
| 6686107 | Method for producing a semiconductor device | Shunichi Matsumoto, Takeshi Kato, Norio Hasegawa | 2004-02-03 |
| 6667806 | Process and apparatus for manufacturing semiconductor device | Takeshi Kato, Toshihiko Nakata | 2003-12-23 |
| 6653032 | Exposure method | Toshiharu Miwa, Tetsuya Yamazaki | 2003-11-25 |
| 6611728 | Inspection system and method for manufacturing electronic devices using the inspection system | Natsuyo Morioka, Hisafumi Iwata, Junko Konishi, Yoko Ikeda, Kazunori Nemoto +1 more | 2003-08-26 |
| 6556955 | Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods | Masataka Shiba, Atsushi Shimoda | 2003-04-29 |
| 6542830 | Process control system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Terushige Asakawa, Yuichi Ohyama +12 more | 2003-04-01 |
| 6456951 | Method and apparatus for processing inspection data | Shunji Maeda, Kenji Oka, Masataka Shiba, Atsushi Shimoda | 2002-09-24 |