Issued Patents All Time
Showing 51–75 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7098464 | Electron beam writing equipment and electron beam writing method | Osamu Kamimura, Yoshinori Nakayama, Sayaka Tanimoto, Masato Muraki | 2006-08-29 |
| 7049607 | Electron beam writing equipment and electron beam writing method | Hiroya Ohta, Osamu Kamimura, Susumu Gotoh | 2006-05-23 |
| 7041988 | Electron beam exposure apparatus and electron beam processing apparatus | Shinichi Hamaguchi, Susumu Goto, Osamu Kamimura | 2006-05-09 |
| 7015482 | Electron beam writing equipment using plural beams and method | Yoshinori Nakayama, Osamu Kamimura, Masato Muraki, Masaki Takakuwa | 2006-03-21 |
| 6903353 | Charged particle beam exposure apparatus, device manufacturing method, and charged particle beam applied apparatus | Masato Muraki, Shinichi Hashimoto | 2005-06-07 |
| 6838682 | Electron beam exposure equipment and electron beam exposure method | Osamu Kamimura, Hiroya Ohta, Susumu Gotoh | 2005-01-04 |
| 6809319 | Electron beam writing equipment and electron beam writing method | Hiroya Ohta, Osamu Kamimura, Susumu Gotoh | 2004-10-26 |
| 6768118 | Electron beam monitoring sensor and electron beam monitoring method | Yoshinori Nakayama, Hiroya Ohta, Norio Saitou, Masato Muraki, Masaki Takakuwa | 2004-07-27 |
| 6667486 | Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same | Hiroya Ohta, Norio Saitou, Haruo Yoda, Yoshikiyo Yui, Shin'ichi Hashimoto | 2003-12-23 |
| 6583431 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura, Hidetoshi Satoh | 2003-06-24 |
| 6573520 | Electron beam lithography system | Hidetoshi Satoh, Hiroshi Tsuji, Kunio Harada | 2003-06-03 |
| 6555833 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura, Hidetoshi Satoh | 2003-04-29 |
| 6511048 | Electron beam lithography apparatus and pattern forming method | Yasuhiro Someda, Hiroya Ohta, Takashi Matsuzaka, Norio Saitou, Yoshinori Nakayama | 2003-01-28 |
| 6509572 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura, Hidetoshi Satoh | 2003-01-21 |
| 6441383 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura, Hidetoshi Satoh | 2002-08-27 |
| 6329665 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura, Hidetoshi Satoh | 2001-12-11 |
| 6320198 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura, Hidetoshi Satoh | 2001-11-20 |
| 6262428 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura, Hidetoshi Satoh | 2001-07-17 |
| 6121625 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura, Hidetoshi Satoh | 2000-09-19 |
| 5831273 | Charged particle beam lithography method and apparatus thereof | Yasuhiro Someda, Yoshinori Nakayama, Hiroyuki Itoh | 1998-11-03 |
| 5759423 | Electron beam writing method and apparatus for carrying out the same | Yasuhiro Someda, Hiroyuki Itoh, Katsuhiro Kawasaki, Norio Saitou | 1998-06-02 |
| 5650631 | Electron beam writing system | Masahide Okumura, Yasuhiro Someda, Hidetoshi Satoh, Yoshinori Nakayama, Norio Saitou | 1997-07-22 |
| 5468969 | Method and apparatus for electron beam lithography | Hiroyuki Itoh, Hideo Todokoro, Yoshinori Nakayama | 1995-11-21 |
| 5396077 | Electron beam lithography apparatus having electron optics correction system | Hiroyuki Itoh, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh, Genya Matsuoka | 1995-03-07 |
| 5387799 | Electron beam writing system | Hideo Todokoro, Hiroyuki Itoh, Shinichi Kato | 1995-02-07 |