Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8772732 | Scanning charged particle beam device and method for correcting chromatic spherical combination aberration | Tomonori Nakano, Takeshi Kawasaki | 2014-07-08 |
| 8581190 | Charged particle beam apparatus and geometrical aberration measurement method therefor | Tomonori Nakano, Takeshi Kawasaki, Hiroyuki Ito | 2013-11-12 |
| 8558171 | Charged particle beam apparatus including aberration corrector | Takeshi Kawasaki, Tomonori Nakano | 2013-10-15 |
| 8436899 | Method and apparatus of tilted illumination observation | Takeshi Kawasaki, Tomonori Nakano | 2013-05-07 |
| 8258475 | Charged particle radiation device provided with aberration corrector | Takeshi Kawasaki, Tomonori Nakano | 2012-09-04 |
| 8129680 | Charged particle beam apparatus including aberration corrector | Takeshi Kawasaki, Tomonori Nakano | 2012-03-06 |
| 7915582 | Method for estimation of probe shape in charged particle beam instruments | Takeshi Kawasaki, Haruo Yoda, Tomonori Nakano | 2011-03-29 |
| 7834326 | Aberration corrector and charged particle beam apparatus using the same | Takeshi Kawasaki, Noboru Moriya, Tomonori Nakano | 2010-11-16 |
| 7714286 | Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program therefor | Tomonori Nakano, Takeshi Kawasaki, Makoto Ezumi | 2010-05-11 |