Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11239042 | Beam irradiation device | Akira Ikegami, Yuta Kawamoto, Naomasa Suzuki, Manabu Yano, Yasushi Ebizuka | 2022-02-01 |
| 11056310 | Charged-particle beam device | Yuta Kawamoto, Akira Ikegami, Yasushi Ebizuka | 2021-07-06 |
| 10832886 | Beam irradiation device | Akira Ikegami, Yuta Kawamoto, Naomasa Suzuki, Manabu Yano, Yasushi Ebizuka | 2020-11-10 |
| 9177757 | Charged particle beam apparatus | Kenji Obara, Takehiro Hirai | 2015-11-03 |
| 9136189 | Surface observation apparatus and surface observation method | Takehiro Hirai, Kenji Obara | 2015-09-15 |
| 8878925 | Observation method and observation device | Kenji Obara | 2014-11-04 |
| 8519334 | Scanning electron microscope and sample observation method | Satoshi Tadaka, Naomasa Suzuki, Tatsuichi Kato | 2013-08-27 |
| 8125647 | Charged particle beam apparatus and displacement detecting circuit | Hiroshi Tsuji | 2012-02-28 |
| 8013299 | Review method and review device | Kenji Obara, Takehiro Hirai, Kohei Yamaguchi | 2011-09-06 |