Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8431893 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Mitsugu Sato, Naomasa Suzuki, Ichiro Tachibana | 2013-04-30 |
| 8207498 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Mitsugu Sato, Naomasa Suzuki, Ichiro Tachibana | 2012-06-26 |
| 8153969 | Inspection method and inspection system using charged particle beam | Mitsugu Sato, Naomasa Suzuki, Hidetoshi Nishiyama, Muneyuki Fukuda, Noritsugu Takahashi | 2012-04-10 |
| 8026481 | Charged particle apparatus, scanning electron microscope, and sample inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Noritsugu Takahashi | 2011-09-27 |
| 7875849 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Mitsugu Sato, Naomasa Suzuki, Ichiro Tachibana | 2011-01-25 |
| 7847249 | Charged particle beam apparatus | Noritsugu Takahashi, Muneyuki Fukuda, Hiroyuki Ito, Masashi Sakamoto, Satoshi Takada | 2010-12-07 |
| 7504626 | Scanning electron microscope and apparatus for detecting defect | Ichiro Tachibana, Mitsugu Sato, Naomasa Suzuki, Muneyuki Fukuda | 2009-03-17 |
| 7462828 | Inspection method and inspection system using charged particle beam | Mitsugu Sato, Naomasa Suzuki, Hidetoshi Nishiyama, Muneyuki Fukuda, Noritsugu Takahashi | 2008-12-09 |
| 7449690 | Inspection method and inspection apparatus using charged particle beam | Hidetoshi Nishiyama, Muneyuki Fukuda, Noritsugu Takahashi, Mitsugu Sato, Naomasa Suzuki | 2008-11-11 |