Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7925367 | Defect review and classification system | Takehiro Hirai, Kazuo Aoki | 2011-04-12 |
| 7881558 | Scanning microscope | Kohei Yamaguchi, Kazuo Aoki | 2011-02-01 |
| 7869969 | Defect review apparatus and method of reviewing defects | Takehiro Hirai, Kohei Yamaguchi | 2011-01-11 |
| 7866746 | Structure of attaching monitor panel | Toyotaka Watanabe, Takayuki Niwa, Nobuhiko Kazui, Masahiro Iwamoto, Satoshi Sugiyama +3 more | 2011-01-11 |
| 7834651 | Power supply circuit | — | 2010-11-16 |
| 7732765 | Scanning electron microscope | Kohei Yamaguchi | 2010-06-08 |
| 7682541 | Manufacturing method of a microchemical chip made of a resin | Mitsuru Saito, Yoshiyuki Ikegami | 2010-03-23 |
| 7664562 | Automatic defect review and classification system | Takehiro Hirai, Kazuo Aoki | 2010-02-16 |
| 7638767 | Scanning electron microscope | Kohei Yamaguchi | 2009-12-29 |
| 7593564 | Method and apparatus for reviewing defect of subject to be inspected | Kazuo Aoki | 2009-09-22 |
| 7584012 | Automatic defect review and classification system | Takehiro Hirai, Kazuo Aoki | 2009-09-01 |
| 7526143 | Imaging method | Kohei Yamaguchi, Kazuo Aoki | 2009-04-28 |
| 7485858 | Inspection method for semiconductor wafer and apparatus for reviewing defects | Takehiro Hirai | 2009-02-03 |
| 7361896 | Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope | Toshifumi Honda, Munenori Fukunishi | 2008-04-22 |
| 7356177 | Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus | Yuji Takagi, Ryo Nakagaki, Yasuhiko Ozawa, Toshiei Kurosaki, Seiji Isogai | 2008-04-08 |
| 7113628 | Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus | Yuji Takagi, Ryo Nakagaki, Yasuhiro Ozawa, Toshiei Kurosaki, Seiji Isogai | 2006-09-26 |
| 7105815 | Method and apparatus for collecting defect images | Toshifumi Honda, Toshiro Kubo | 2006-09-12 |
| 7068834 | Inspecting method, inspecting system, and method for manufacturing electronic devices | Yoko Ikeda, Junko Konishi, Hisafumi Iwata, Yuji Takagi, Ryo Nakagaki +2 more | 2006-06-27 |
| 6870169 | Method and apparatus for analyzing composition of defects | Yuji Takagi, Hisae Shibuya, Naoki Hosoya | 2005-03-22 |
| 6792366 | Method and apparatus for inspecting defects in a semiconductor wafer | Naoki Hosoya, Yuuji Takagi, Hisae Shibuya | 2004-09-14 |
| 6792367 | Method and apparatus for inspecting defects in a semiconductor wafer | Naoki Hosoya, Yuuji Takagi, Hisae Shibuya | 2004-09-14 |
| 6756589 | Method for observing specimen and device therefor | Yuji Takagi, Atsushi Shimoda, Ryou Nakagaki, Seiji Isogai, Yasuhiko Ozawa +3 more | 2004-06-29 |
| 6741941 | Method and apparatus for analyzing defect information | Yuji Takagi, Hisae Shibuya | 2004-05-25 |
| 6553323 | Method and its apparatus for inspecting a specimen | Yuji Takagi, Toshifumi Honda, Ryo Nakagaki, Toshiei Kurosaki, Yasuhiko Ozawa | 2003-04-22 |
| 6476388 | Scanning electron microscope having magnification switching control | Ryo Nakagaki, Yuji Takagi, Atsushi Shimoda, Yasuhiko Ozawa, Hideka Bamba +4 more | 2002-11-05 |