Issued Patents All Time
Showing 51–75 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6717142 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2004-04-06 |
| 6657221 | Image classification method, observation method, and apparatus thereof with different stage moving velocities | Ryo Nakagaki, Yuji Takagi, Masahiro Watanabe, Minori Noguchi, Kazuo Aoki | 2003-12-02 |
| 6614022 | Pattern inspection method and apparatus using electron beam | Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2003-09-02 |
| 6614923 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Chie Shishido, Yuji Takagi, Shuji Maeda, Takanori Ninomiya, Masahiro Watanabe +1 more | 2003-09-02 |
| 6587581 | Visual inspection method and apparatus therefor | Yukio Matsuyama, Yuji Takagi, Maki Tanaka, Asahiro Kuni, Junzou Azuma +2 more | 2003-07-01 |
| 6567168 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara | 2003-05-20 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |
| 6559459 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Taku Ninomiya | 2003-05-06 |
| 6504609 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami | 2003-01-07 |
| 6493082 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +2 more | 2002-12-10 |
| 6480279 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami | 2002-11-12 |
| 6476913 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami, Maki Ito | 2002-11-05 |
| 6421122 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +2 more | 2002-07-16 |
| 6388747 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami | 2002-05-14 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka +8 more | 2002-04-23 |
| 6373054 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2002-04-16 |
| 6347150 | Method and system for inspecting a pattern | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Hiroyuki Shinada, Mari Nozoe +2 more | 2002-02-12 |
| 6335532 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Taku Ninomiya | 2002-01-01 |
| 6333510 | Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2001-12-25 |
| 6329826 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-12-11 |
| 6317512 | Pattern checking method and checking apparatus | Shunji Maeda, Hitoshi Kubota, Hiroshi Makihira | 2001-11-13 |
| 6236057 | Method of inspecting pattern and apparatus thereof with a differential brightness image detection | Chie Shishido, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka +8 more | 2001-05-22 |
| 6172363 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-01-09 |
| 6172365 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2001-01-09 |
| 6107637 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2000-08-22 |