Issued Patents All Time
Showing 76–83 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6087673 | Method of inspecting pattern and apparatus thereof | Chie Shishido, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka +8 more | 2000-07-11 |
| 5986263 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 1999-11-16 |
| 5649022 | Pattern checking method and checking apparatus | Shunji Maeda, Hitoshi Kubota, Hiroshi Makihira | 1997-07-15 |
| 5430548 | Method and apparatus for pattern detection | Hitoshi Kubota, Shunji Maeda, Hiroshi Makihira, Mitsunobu Isobe | 1995-07-04 |
| 5157735 | Chipping detection system and method | Shunji Maeda, Hitoshi Kubota, Satoru Fushimi | 1992-10-20 |
| 5153444 | Method and apparatus for detecting patterns | Shunji Maeda, Hitoshi Kubota, Hiroshi Makihira, Fumiaki Endo | 1992-10-06 |
| 4772125 | Apparatus and method for inspecting soldered portions | Kazushi Yoshimura, Takanori Ninomiya, Toshimitsu Hamada, Yasuo Nakagawa, Kohichi Karasaki | 1988-09-20 |
| 4641527 | Inspection method and apparatus for joint junction states | Takanori Ninomiya, Yasuo Nakagawa | 1987-02-10 |