Issued Patents All Time
Showing 26–50 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7421110 | Image processing unit for wafer inspection tool | Michio Nakano, Shigeya Tanaka, Yoshiyuki Momiyama, Kazuya Hayashi, Dai Fujii +3 more | 2008-09-02 |
| 7420167 | Apparatus and method for electron beam inspection with projection electron microscopy | Hirohito Okuda, Hiroshi Makino | 2008-09-02 |
| 7417444 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2008-08-26 |
| 7329889 | Electron beam apparatus and method with surface height calculator and a dual projection optical unit | Masahiro Watanabe, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2008-02-12 |
| 7292327 | Circuit-pattern inspection apparatus | Yasuhiko Nara, Masaaki Nojiri, Kouichi Hayakawa | 2007-11-06 |
| 7269280 | Method and its apparatus for inspecting a pattern | Masahiro Watanabe, Maki Tanaka, Asahiro Kuni, Chie Shishido, Hiroshi Miyai +2 more | 2007-09-11 |
| 7266235 | Pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2007-09-04 |
| 7263216 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Chie Shishido, Yuji Takagi, Shuji Maeda, Takanori Ninomiya, Masahiro Watanabe +1 more | 2007-08-28 |
| 7260256 | Method and system for inspecting a pattern | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Hiroyuki Shinada, Mari Nozoe +2 more | 2007-08-21 |
| 7133550 | Pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2006-11-07 |
| 7122796 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2006-10-17 |
| 7116816 | Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen | Maki Tanaka, Masahiro Watanabe, Chie Shishido, Hiroshi Morioka, Kenji Watanabe +2 more | 2006-10-03 |
| 7049587 | Apparatus for inspecting a specimen | Masahiro Watanabe, Asahiro Kuni, Maki Tanaka, Munenori Fukunishi, Hiroshi Miyai +2 more | 2006-05-23 |
| 7026830 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2006-04-11 |
| 6975754 | Circuit pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-12-13 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2005-09-06 |
| 6919564 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +2 more | 2005-07-19 |
| 6919577 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2005-07-19 |
| 6903821 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +2 more | 2005-06-07 |
| 6898305 | Circuit pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-05-24 |
| 6885012 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Taku Ninomiya | 2005-04-26 |
| 6828554 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2004-12-07 |
| 6759655 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +1 more | 2004-07-06 |
| 6753518 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2004-06-22 |
| 6744057 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Taku Ninomiya | 2004-06-01 |