Issued Patents All Time
Showing 51–75 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6509564 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Atsuko Takafuji, Yasutsugu Usami, Shuji Sugiyama | 2003-01-21 |
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Hisaya Murakoshi, Yusuke Yajima, Mari Nozoe, Atsuko Takafuji, Kaoru Umemura +2 more | 2002-11-05 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-09-17 |
| 6373054 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2002-04-16 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-02-19 |
| 6347150 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Mari Nozoe +2 more | 2002-02-12 |
| 6335532 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Taku Ninomiya | 2002-01-01 |
| 6333510 | Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Yasutsugu Usami | 2001-12-25 |
| 6329826 | Method and apparatus for inspecting integrated circuit pattern | Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2001-12-11 |
| 6310341 | Projecting type charged particle microscope and projecting type substrate inspection system | Hideo Todokoro, Tohru Ishitani, Yasutsugu Usami, Shunroku Taya, Taku Ninomiya +1 more | 2001-10-30 |
| 6172363 | Method and apparatus for inspecting integrated circuit pattern | Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2001-01-09 |
| 6172365 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2001-01-09 |
| 6107637 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Yasutsugu Usami | 2000-08-22 |
| 5986263 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 1999-11-16 |
| 5932880 | Scintillator device and image pickup apparatus using the same | Masanari Koguchi, Hiroshi Kakibayashi, Tetsuya Ooshima, Kenji Sameshima, Tatsuo Makishima +1 more | 1999-08-03 |
| 5838096 | Cathode having a reservoir and method of manufacturing the same | Satoru Fukuhara, Katsuhiro Kuroda | 1998-11-17 |
| 5811819 | Electron beam source and its manufacturing method and electron beam source apparatus and electron beam apparatus using the same | Takashi Ohshima, Katsuhiro Kuroda | 1998-09-22 |
| 5763880 | Cathode, electron beam emission apparatus using the same, and method of manufacturing the cathode | Hidetoshi Nisiyama, Masakuni Okamoto, Katsuhiro Kuroda | 1998-06-09 |
| 5666053 | Charged particle beam apparatus for measuring magnetic field | Hiroshi Suzuki, Katsuhiro Kuroda, Yusuke Yajima, Yoshio Takahashi, Hideo Saito +1 more | 1997-09-09 |
| 5616926 | Schottky emission cathode and a method of stabilizing the same | Shingo Kimura, Katsuhiro Kuroda, Satoru Fukuhara, Takashi Ohshima | 1997-04-01 |
| 5402295 | Magnetic recording head capable of defining narrow track width and magnetic recording apparatus using the same | Hiroshi Suzuki, Hideo Todokoro, Hisashi Takano | 1995-03-28 |
| 5345080 | Method of observing electron microscopic images and an apparatus for carrying out of the same | Yusuke Yajima, Masakazu Ichikawa | 1994-09-06 |
| 5283440 | Electron beam writing system used in a cell projection method | Yasunari Sohda, Hideo Todokoro, Norio Saitou, Haruo Yoda, Hiroyuki Itoh +2 more | 1994-02-01 |
| 5160884 | Charged particle beam device | Hideo Todokoro, Satoru Fukuhara | 1992-11-03 |
| 5111141 | Magnetic field measurement optimization apparatus using a charged particle beam | Satoru Fukuhara, Shigemitsu Seitoh | 1992-05-05 |