Issued Patents All Time
Showing 26–50 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7022986 | Apparatus and method for wafer pattern inspection | Hisaya Murakoshi, Hideo Todokoro, Hiroshi Makino, Yoshihiro Anan | 2006-04-04 |
| 7012252 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2006-03-14 |
| 6987265 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2006-01-17 |
| 6979823 | Patterned wafer inspection method and apparatus therefor | Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe, Atsuko Takafuji +4 more | 2005-12-27 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Yasuhiro Gunji +1 more | 2005-09-06 |
| 6931620 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama, Mari Nozoe | 2005-08-16 |
| 6919577 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Yasutsugu Usami | 2005-07-19 |
| 6888138 | Absorption current image apparatus in electron microscope | Takashi Ohshima, Hiroshi Makino, Hiroshi Toyama | 2005-05-03 |
| 6885012 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Taku Ninomiya | 2005-04-26 |
| 6828554 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2004-12-07 |
| 6825480 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Atsuko Takafuji, Masami Iizuka, Yasuhiro Gunji, Kouichi Hayakawa +1 more | 2004-11-30 |
| 6797954 | Patterned wafer inspection method and apparatus therefor | Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe, Atsuko Takafuji +4 more | 2004-09-28 |
| 6768113 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Atsuko Takafuji, Yasutsugu Usami, Shuji Sugiyama | 2004-07-27 |
| 6753518 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Yasutsugu Usami | 2004-06-22 |
| 6744057 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Taku Ninomiya | 2004-06-01 |
| 6717142 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama +3 more | 2004-04-06 |
| 6703850 | Method of inspecting circuit pattern and inspecting instrument | Mari Nozoe, Kenji Watanabe, Keiichi Saiki, Aritoshi Sugimoto, Hiroshi Morioka +2 more | 2004-03-09 |
| 6653637 | X-ray detector and charged-particle apparatus | Isao Ochiai, Kimio Kanda | 2003-11-25 |
| 6618850 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama, Mari Nozoe | 2003-09-09 |
| 6614022 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Yasuhiro Gunji +1 more | 2003-09-02 |
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2003-06-24 |
| 6583634 | Method of inspecting circuit pattern and inspecting instrument | Mari Nozoe, Kenji Watanabe, Keiichi Saiki, Aritoshi Sugimoto, Hiroshi Morioka +2 more | 2003-06-24 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2003-05-06 |
| 6559459 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Taku Ninomiya | 2003-05-06 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2003-01-28 |