Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6509564 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Hiroyuki Shinada, Yasutsugu Usami, Shuji Sugiyama | 2003-01-21 |
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Hisaya Murakoshi, Yusuke Yajima, Hiroyuki Shinada, Mari Nozoe, Kaoru Umemura +2 more | 2002-11-05 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-09-17 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2002-02-19 |
| 6329826 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-12-11 |
| 6236057 | Method of inspecting pattern and apparatus thereof with a differential brightness image detection | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2001-05-22 |
| 6172363 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-01-09 |
| 6087673 | Method of inspecting pattern and apparatus thereof | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2000-07-11 |
| 5561697 | Microtron electron accelerator | Katsuya Sugiyama, Katsuhiro Kuroda, Keiji Koyanagi, Ichiro Miura, Masatoshi Nishimura | 1996-10-01 |
| 5490193 | X-ray computed tomography system | Katsuhiro Kuroda, Koichi Koike, Fumio Noda | 1996-02-06 |
| 5399873 | Microtron electron accelerator | Katsuya Sugiyama, Katsuhiro Kuroda, Keiji Koyanagi, Ichiro Miura, Masatoshi Nishimura | 1995-03-21 |