Issued Patents All Time
Showing 51–75 of 137 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6956211 | Charged particle beam apparatus and charged particle beam irradiation method | Mitsugu Sato, Yoichi Ose, Makoto Ezumi, Noriaki Arai, Takashi Doi | 2005-10-18 |
| 6956212 | Electron microscope observation system and observation method | — | 2005-10-18 |
| 6946656 | Sample electrification measurement method and charged particle beam apparatus | Makoto Ezumi, Yoichi Ose, Akira Ikegami, Tatsuaki Ishijima, Takahiro Sato +2 more | 2005-09-20 |
| 6936818 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2005-08-30 |
| 6885001 | Scanning electron microscope | Yoichi Ose, Makoto Ezumi, Mitsugu Sato | 2005-04-26 |
| 6872943 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Atsushi Takane, Satoru Yamaguchi, Osamu Komuro, Yasuhiko Ozawa | 2005-03-29 |
| 6872944 | Scanning electron microscope | Shou Takami, Makoto Ezumi, Osamu Yamada, Yoichi Ose, Tomohiro Kudo | 2005-03-29 |
| 6864482 | Electron beam apparatus | Mitsugu Sato | 2005-03-08 |
| 6847038 | Scanning electron microscope | Makoto Ezumi, Yoichi Ose, Naomasa Suzuki | 2005-01-25 |
| 6839200 | Combination perpendicular magnetic head having shield material formed at both ends of an upper pole of a write element | Hisashi Takano, Naoki Koyama, Hideo Tanabe, Eijin Moriwaki, Isamu Yuito +5 more | 2005-01-04 |
| 6822232 | Electronic microscope observation system and observation method | — | 2004-11-23 |
| 6791084 | Method and scanning electron microscope for measuring dimension of material on sample | Goroku Shimoma, Tadashi Otaka, Mitsugu Sato, Shunichi Watanabe, Tadanori Takahashi +3 more | 2004-09-14 |
| 6787772 | Scanning electron microscope | Yoichi Ose, Makoto Ezumi, Mitsugu Sato | 2004-09-07 |
| 6667476 | Scanning electron microscope | Shou Takami, Makoto Ezumi, Osamu Yamada, Yoichi Ose, Tomohiro Kudo | 2003-12-23 |
| 6665141 | Magnetic head having track width defined by trench portions filled with magnetic shield material | Hisashi Takano, Naoki Koyama, Hideo Tanabe, Eijin Moriwaki, Isamu Yuito +5 more | 2003-12-16 |
| 6653633 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-11-25 |
| 6646262 | Scanning electron microscope | Makoto Ezumi, Yoichi Ose, Naomasa Suzuki | 2003-11-11 |
| 6635873 | Scanning electron microscope with voltage applied to the sample | Makoto Ezumi, Yasutsugu Usami | 2003-10-21 |
| 6555819 | Scanning electron microscope | Naomasa Suzuki, Toshiro Kubo, Noriaki Arai, Mitsugu Sato, Yoichi Ose | 2003-04-29 |
| 6538249 | Image-formation apparatus using charged particle beams under various focus conditions | Atsushi Takane, Haruo Yoda, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-03-25 |
| 6538844 | Method of fabricating a magnetic head by focused ion beam etching | Hisashi Takano, Naoki Koyama, Hideo Tanabe, Eijin Moriwaki, Isamu Yuito +5 more | 2003-03-25 |
| 6512228 | Scanning electron microscope | Sho Takami, Makoto Ezumi | 2003-01-28 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2003-01-28 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2002-09-17 |
| 6444981 | Scanning electron microscope | Sho Takami, Makoto Ezumi | 2002-09-03 |