Issued Patents All Time
Showing 101–125 of 137 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5468969 | Method and apparatus for electron beam lithography | Hiroyuki Itoh, Yasunari Sohda, Yoshinori Nakayama | 1995-11-21 |
| 5463221 | Electron beam measuring apparatus | Tadashi Otaka, Hiroyoshi Mori | 1995-10-31 |
| 5424541 | Scanning electron microscope and method for controlling a scanning electron microscope | Tadashi Ohtaka | 1995-06-13 |
| 5412209 | Electron beam apparatus | Tadashi Otaka, Akimitsu Okura, Hiroshi Iwamoto, Tsutomu Komoda, Issei Tobita | 1995-05-02 |
| 5412210 | Scanning electron microscope and method for production of semiconductor device by using the same | Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada, Katsuhiro Kuroda +2 more | 1995-05-02 |
| 5402295 | Magnetic recording head capable of defining narrow track width and magnetic recording apparatus using the same | Hiroshi Suzuki, Hisashi Takano, Hiroyuki Shinada | 1995-03-28 |
| 5389787 | Scanning electron microscope | Tadashi Otaka | 1995-02-14 |
| 5387799 | Electron beam writing system | Yasunari Sohda, Hiroyuki Itoh, Shinichi Kato | 1995-02-07 |
| 5387793 | Scanning electron microscope | Mitsugu Sato, Tadashi Otaka | 1995-02-07 |
| 5311026 | Charged particle beam lithography system and method therefor | Norio Saitou, Yoshihiko Okamoto, Takashi Yamazaki | 1994-05-10 |
| 5283440 | Electron beam writing system used in a cell projection method | Yasunari Sohda, Norio Saitou, Haruo Yoda, Hiroyuki Itoh, Hiroyuki Shinada +2 more | 1994-02-01 |
| 5278408 | Instrument and method for 3-dimensional atomic arrangement observation | Hiroshi Kakibayashi, Yasuhiro Mitsui, Katsuhiro Kuroda | 1994-01-11 |
| 5276325 | Scanning microscope and a method of operating such a scanning microscope | Tadashi Otaka, Osamu Yamada | 1994-01-04 |
| 5162240 | Method and apparatus of fabricating electric circuit pattern on thick and thin film hybrid multilayer wiring substrate | Norio Saitou, Katsuhiro Kuroda, Satoru Fukuhara, Genya Matsuoka, Hideo Arima +3 more | 1992-11-10 |
| 5160884 | Charged particle beam device | Hiroyuki Shinada, Satoru Fukuhara | 1992-11-03 |
| 5093616 | Voltage measurement method using electron beam | Shigemitsu Seitoh, Satoru Fukuhara, Hiroyuki Shinada | 1992-03-03 |
| 5068605 | Semiconductor integrated circuit device and method of testing the same | Moritoshi Yasunaga, Noboru Masuda, Yasunari Umemoto, Hirotoshi Tanaka, Hiroyuki Itoh | 1991-11-26 |
| 4922097 | Potential measurement device | Hiroyuki Shinada, Shigemitsu Seitoh | 1990-05-01 |
| 4900974 | Ion source | Tohru Ishitani, Hifumi Tamura | 1990-02-13 |
| 4868394 | Charged particle detector | Satoru Fukuhara, Hiroyuki Shinada | 1989-09-19 |
| 4855673 | Electron beam apparatus | — | 1989-08-08 |
| 4827127 | Apparatus using charged particle beam | — | 1989-05-02 |
| 4803430 | Magnetic/electric field measuring device by means of an electron beam | Hiroyuki Shinada, Satoru Fukuhara | 1989-02-07 |
| 4774460 | Stroboscopic type potential measurement device | Osamu Yamada | 1988-09-27 |
| 4772847 | Stroboscopic type potential measurement device | — | 1988-09-20 |