Issued Patents All Time
Showing 26–50 of 137 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7372028 | Sample electrification measurement method and charged particle beam apparatus | Makoto Ezumi, Yoichi Ose, Akira Ikegami, Tatsuaki Ishijima, Takahiro Sato +2 more | 2008-05-13 |
| 7361894 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Atsushi Takane, Takashi Iizumi, Tadashi Otaka, Satoru Yamaguchi +1 more | 2008-04-22 |
| 7340111 | Image evaluation method and microscope | Tohru Ishitani, Mitsugu Sato, Tadashi Otaka, Takashi Iizumi, Atsushi Takane | 2008-03-04 |
| 7329868 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2008-02-12 |
| 7315024 | Monochromator and scanning electron microscope using the same | Yoichi Ose, Shunroku Taya, Tadashi Otaka, Mitsugu Sato, Makoto Ezumi | 2008-01-01 |
| 7294835 | Scanning electron microscope | Makoto Ezumi, Yoichi Ose, Naomasa Suzuki | 2007-11-13 |
| 7282722 | Charged particle beam apparatus and charged particle beam irradiation method | Mitsugu Sato, Yoichi Ose, Makoto Ezumi, Noriaki Arai, Takashi Doi | 2007-10-16 |
| 7236651 | Image evaluation method and microscope | Tohru Ishitani, Mitsugu Sato, Tadashi Otaka, Takashi Iizumi, Atsushi Takane | 2007-06-26 |
| 7232996 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2007-06-19 |
| 7199365 | Electron beam apparatus with aberration corrector | Takeshi Kawasaki, Takaho Yoshida, Yoichi Ose | 2007-04-03 |
| 7186975 | Scanning charged-particle microscope | Tohru Ishitani, Mitsugu Sato | 2007-03-06 |
| 7166840 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Atsushi Takane, Satoru Yamaguchi, Osamu Komuro, Yasuhiko Ozawa | 2007-01-23 |
| 7164126 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Atsushi Takane, Takashi Iizumi, Tadashi Otaka, Satoru Yamaguchi +1 more | 2007-01-16 |
| 7109485 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2006-09-19 |
| 7087899 | Sample electrification measurement method and charged particle beam apparatus | Makoto Ezumi, Yoichi Ose, Akira Ikegami, Tatsuaki Ishijima, Takahiro Sato +2 more | 2006-08-08 |
| 7075076 | Inspection system, inspection method, and process management method | Hiroshi Makino, Hisaya Murakoshi, Hiroyuki Shinada | 2006-07-11 |
| 7075078 | Scanning electron microscope | Yoichi Ose, Makoto Ezumi, Mitsugu Sato | 2006-07-11 |
| 7049591 | Scanning electron microscope | Makoto Ezumi, Yoichi Ose, Naomasa Suzuki | 2006-05-23 |
| 7034296 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Atsushi Takane, Takashi Iizumi, Tadashi Otaka, Satoru Yamaguchi +1 more | 2006-04-25 |
| 7022986 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hisaya Murakoshi, Hiroshi Makino, Yoshihiro Anan | 2006-04-04 |
| 7022983 | Monochromator and scanning electron microscope using the same | Yoichi Ose, Shunroku Taya, Tadashi Otaka, Mitsugu Sato, Makoto Ezumi | 2006-04-04 |
| 7012252 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2006-03-14 |
| 6987265 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2006-01-17 |
| 6982427 | Electron beam apparatus with aberration corrector | Takeshi Kawasaki, Takaho Yoshida, Yoichi Ose | 2006-01-03 |
| 6979821 | Scanning electron microscope | Naomasa Suzuki, Toshiro Kubo, Noriaki Arai, Mitsugu Sato, Yoichi Ose | 2005-12-27 |