Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11894211 | Electron beam apparatus and method for controlling electron beam apparatus | Erina Kawamoto, Soichiro Matsunaga, Souichi Katagiri, Keigo Kasuya, Takashi Doi +1 more | 2024-02-06 |
| 9202667 | Charged particle radiation device with bandpass detection | Michio Hatano, Yasuko Watanabe, Mitsugu Sato, Sukehiro Ito, Takashi Ohshima +1 more | 2015-12-01 |
| 8629395 | Charged particle beam apparatus | Hideo Morishita, Michio Hatano, Takashi Ohshima, Mitsugu Sato, Sukehiro Ito +1 more | 2014-01-14 |
| 7705302 | Scanning electron microscope | Yasuko Aoki, Mine Araki, Atsushi Muto, Shuichi Takeuchi | 2010-04-27 |
| 6855931 | Scanning electron microscope and sample observation method using the same | Mitsugu Sato | 2005-02-15 |
| 6740877 | Scanning electron microscope and sample observation method using the same | Mitsugu Sato | 2004-05-25 |
| 6555816 | Scanning electron microscope and sample observation method using the same | Mitsugu Sato | 2003-04-29 |
| 6501077 | Scanning electron microscope | Mitsugu Sato, Yoichi Ose | 2002-12-31 |