MS

Mitsugu Sato

HH Hitachi High-Technologies: 76 patents #3 of 1,917Top 1%
HI Hitachi: 53 patents #249 of 28,497Top 1%
HS Hitachi Science Systems: 2 patents #12 of 77Top 20%
HC Hitachi Instruments Engineering Co.: 1 patents #18 of 126Top 15%
SO Sony: 1 patents #17,262 of 25,231Top 70%
Overall (All Time): #8,573 of 4,157,543Top 1%
129
Patents All Time

Issued Patents All Time

Showing 51–75 of 129 patents

Patent #TitleCo-InventorsDate
7501625 Electron microscope application apparatus and sample inspection method Hikaru Koyama, Hiroshi Makino 2009-03-10
7491933 Electron beam apparatus Hideo Todokoro 2009-02-17
7462828 Inspection method and inspection system using charged particle beam Atsuko Fukada, Naomasa Suzuki, Hidetoshi Nishiyama, Muneyuki Fukuda, Noritsugu Takahashi 2008-12-09
7459683 Charged particle beam device with DF-STEM image valuation method Mine Araki, Shunya Watanabe, Chisato Kamiya, Atsushi Takane, Akinari Morikawa +2 more 2008-12-02
7456403 Charged particle beam device Yuusuke Tanba, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto 2008-11-25
7449690 Inspection method and inspection apparatus using charged particle beam Hidetoshi Nishiyama, Muneyuki Fukuda, Noritsugu Takahashi, Atsuko Fukada, Naomasa Suzuki 2008-11-11
7442929 Scanning electron microscope Hirohiko Kitsuki, Kazuo Aoki 2008-10-28
7439506 Method and an apparatus of an inspection system using an electron beam Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more 2008-10-21
7435957 Charged particle beam equipment and charged particle microscopy Hiromi Inada, Atsushi Takane 2008-10-14
7425702 Charged particle beam apparatus Yuko Sasaki 2008-09-16
7408172 Charged particle beam apparatus and charged particle beam irradiation method Hideo Todokoro, Yoichi Ose, Makoto Ezumi, Noriaki Arai, Takashi Doi 2008-08-05
7385196 Method and scanning electron microscope for measuring width of material on sample Goroku Shimoma, Tadashi Otaka, Hideo Todokoro, Shunichi Watanabe, Tadanori Takahashi +3 more 2008-06-10
7381968 Charged particle beam apparatus and specimen holder Hiroyuki Tanaka, Masashi Sasaki, Yoshifumi Taniguchi 2008-06-03
7375330 Charged particle beam equipment Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Atsushi Takane +1 more 2008-05-20
7372047 Charged particle system and a method for measuring image magnification Atsushi Takane, Shigeto Isakozawa, Takashi Iizumi, Tatsuya Maeda, Hiromi Inada 2008-05-13
7361894 Method of forming a sample image and charged particle beam apparatus Atsushi Takane, Takashi Iizumi, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more 2008-04-22
7355174 Charged particle beam emitting device and method for adjusting the optical axis Makoto Ezumi, Satoru Yamaguchi 2008-04-08
7355177 Electron beam device Chisato Kamiya, Masahiro Akatsu 2008-04-08
7348559 Defect inspection and charged particle beam apparatus Toshihide Agemura 2008-03-25
7340111 Image evaluation method and microscope Tohru Ishitani, Hideo Todokoro, Tadashi Otaka, Takashi Iizumi, Atsushi Takane 2008-03-04
7339167 Charged particle beam apparatus Takashi Ohshima, Soichi Katagiri 2008-03-04
7329868 Charged particle beam apparatus Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more 2008-02-12
7315024 Monochromator and scanning electron microscope using the same Yoichi Ose, Shunroku Taya, Hideo Todokoro, Tadashi Otaka, Makoto Ezumi 2008-01-01
7282722 Charged particle beam apparatus and charged particle beam irradiation method Hideo Todokoro, Yoichi Ose, Makoto Ezumi, Noriaki Arai, Takashi Doi 2007-10-16
7236651 Image evaluation method and microscope Tohru Ishitani, Hideo Todokoro, Tadashi Otaka, Takashi Iizumi, Atsushi Takane 2007-06-26