Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8969828 | Scanning electron microscope with a table being guided by rolling friction elements | Naoki Sakamoto, Shigeru Haneda, Shinsuke Kawanishi | 2015-03-03 |
| 8907303 | Stage device and control method for stage device | Yasuyuki Momoi, Shigeru Haneda | 2014-12-09 |
| 7964845 | Charged particle beam device | Yuusuke Tanba, Mitsugu Sato, Shunya Watanabe, Mine Nakagawa, Atsushi Muto +1 more | 2011-06-21 |
| 7891482 | Work carrier apparatus in assembly line | Yoshiharu Hatsusaka, Mikiya Fukuda | 2011-02-22 |
| 7456403 | Charged particle beam device | Yuusuke Tanba, Mitsugu Sato, Shunya Watanabe, Mine Nakagawa, Atsushi Muto | 2008-11-25 |
| 6963069 | Charged particle beam device | Yuusuke Tanba, Mitsugu Sato, Shunya Watanabe, Mine Nakagawa, Atsushi Muto +1 more | 2005-11-08 |
| 6403968 | Scanning electron microscope | Eiichi Hazaki, Masaki Kurihara | 2002-06-11 |