Issued Patents All Time
Showing 101–125 of 129 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740877 | Scanning electron microscope and sample observation method using the same | Tetsuya Sawahata | 2004-05-25 |
| 6657193 | Scanning electron microscope | Yukari Dan, Ryuichiro Tamochi | 2003-12-02 |
| 6653633 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more | 2003-11-25 |
| 6627889 | Apparatus and method for observing sample using electron beam | Isao Ochiai, Hidemi Koike, Satoshi Tomimatsu, Muneyuki Fukuda, Tohru Ishitani | 2003-09-30 |
| 6580074 | Charged particle beam emitting device | Yuko Iwabuchi | 2003-06-17 |
| 6555816 | Scanning electron microscope and sample observation method using the same | Tetsuya Sawahata | 2003-04-29 |
| 6555819 | Scanning electron microscope | Naomasa Suzuki, Toshiro Kubo, Noriaki Arai, Hideo Todokoro, Yoichi Ose | 2003-04-29 |
| 6541771 | Scanning electron microscope | Yuko Iwabuchi | 2003-04-01 |
| 6538249 | Image-formation apparatus using charged particle beams under various focus conditions | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more | 2003-03-25 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2003-01-28 |
| 6501077 | Scanning electron microscope | Tetsuya Sawahata, Yoichi Ose | 2002-12-31 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2002-09-17 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2002-02-19 |
| 6225628 | Scanning electron microscope | Yuko Iwabuchi | 2001-05-01 |
| 6166380 | Resolving power evaluation method and specimen for electron microscope | Taiji Kitagawa, Goroku Shimoma, Tadanori Takahashi, Naoto Yoshida, Masayuki Yukii +3 more | 2000-12-26 |
| 6043491 | Scanning electron microscope | Yoichi Ose, Kiyomi Yoshinari, Hideo Todokoro | 2000-03-28 |
| 6025593 | Scanning electron microscope | Naomasa Suzuki | 2000-02-15 |
| 5903004 | Energy dispersive X-ray analyzer | Shunsuke Koshihara, Naomasa Suzuki | 1999-05-11 |
| 5894124 | Scanning electron microscope and its analogous device | Yuko Iwabuchi, Yoichi Ose | 1999-04-13 |
| 5731580 | Scanning electron microscope | Naomasa Suzuki | 1998-03-24 |
| 5677530 | Scanning electron microscope | Ryuji Hoya, Yoichi Ose | 1997-10-14 |
| 5670782 | Scanning electron microscope and speciman observation method thereby | — | 1997-09-23 |
| 5668372 | Scanning electron microscope and its analogous device | Yuko Iwabuchi, Yoichi Ose | 1997-09-16 |
| 5608218 | Scanning electron microscope | Yoichi Ose, Satoru Fukuhara, Hideo Todokoro, Makoto Ezumi | 1997-03-04 |
| 5393977 | Charged particle beam apparatus and it's operating method | Akimitsu Okura, Osamu Yamada, Yasushi Nakaizumi, Eiichi Hazaki | 1995-02-28 |