Issued Patents All Time
Showing 76–100 of 129 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7232996 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2007-06-19 |
| 7214936 | Charged particle beam apparatus and dimension measuring method | Katsuhiko Sakai, Atsushi Takane, Yoshihiko Nakayama | 2007-05-08 |
| 7186975 | Scanning charged-particle microscope | Tohru Ishitani, Hideo Todokoro | 2007-03-06 |
| 7164126 | Method of forming a sample image and charged particle beam apparatus | Atsushi Takane, Takashi Iizumi, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more | 2007-01-16 |
| 7112792 | Defect inspection and charged particle beam apparatus | Toshihide Agemura | 2006-09-26 |
| 7109485 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more | 2006-09-19 |
| 7105816 | Electron beam device | Chisato Kamiya, Masahiro Akatsu | 2006-09-12 |
| 7075078 | Scanning electron microscope | Yoichi Ose, Hideo Todokoro, Makoto Ezumi | 2006-07-11 |
| 7034296 | Method of forming a sample image and charged particle beam apparatus | Atsushi Takane, Takashi Iizumi, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more | 2006-04-25 |
| 7022983 | Monochromator and scanning electron microscope using the same | Yoichi Ose, Shunroku Taya, Hideo Todokoro, Tadashi Otaka, Makoto Ezumi | 2006-04-04 |
| 7012252 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2006-03-14 |
| 6987265 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2006-01-17 |
| 6979821 | Scanning electron microscope | Naomasa Suzuki, Toshiro Kubo, Noriaki Arai, Hideo Todokoro, Yoichi Ose | 2005-12-27 |
| 6963069 | Charged particle beam device | Yuusuke Tanba, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto +1 more | 2005-11-08 |
| 6963067 | Scanning electron microscope and sample observing method using it | Shuichi Takeuchi, Mine Nakagawa, Atsushi Takane, Kazutaka Nimura | 2005-11-08 |
| 6956211 | Charged particle beam apparatus and charged particle beam irradiation method | Hideo Todokoro, Yoichi Ose, Makoto Ezumi, Noriaki Arai, Takashi Doi | 2005-10-18 |
| 6936818 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more | 2005-08-30 |
| 6885001 | Scanning electron microscope | Yoichi Ose, Hideo Todokoro, Makoto Ezumi | 2005-04-26 |
| 6875984 | Bio electron microscope and observation method of specimen | Hiroshi Kakibayashi, Shigeyuki Hosoki, Yuji Takagi, Ryo Miyake, Kuniyasu Nakamura +1 more | 2005-04-05 |
| 6864493 | Charged particle beam alignment method and charged particle beam apparatus | Tadashi Otaka, Makoto Ezumi, Atsushi Takane, Shoji Yoshida, Satoru Yamaguchi +1 more | 2005-03-08 |
| 6864482 | Electron beam apparatus | Hideo Todokoro | 2005-03-08 |
| 6855931 | Scanning electron microscope and sample observation method using the same | Tetsuya Sawahata | 2005-02-15 |
| 6838667 | Method and apparatus for charged particle beam microscopy | Ruriko Tsuneta, Masanari Koguchi, Mari Nozoe, Muneyuki Fukuda | 2005-01-04 |
| 6791084 | Method and scanning electron microscope for measuring dimension of material on sample | Goroku Shimoma, Tadashi Otaka, Hideo Todokoro, Shunichi Watanabe, Tadanori Takahashi +3 more | 2004-09-14 |
| 6787772 | Scanning electron microscope | Yoichi Ose, Hideo Todokoro, Makoto Ezumi | 2004-09-07 |