Issued Patents All Time
Showing 26–50 of 129 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973282 | Charged particle beam apparatus and dimension measuring method | Katsuhiko Sakai, Atsushi Takane, Yoshihiko Nakayama | 2011-07-05 |
| 7964845 | Charged particle beam device | Yuusuke Tanba, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto +1 more | 2011-06-21 |
| 7956324 | Charged particle beam apparatus for forming a specimen image | Noritsugu Takahashi, Muneyuki Fukuda, Hideo Todokoro | 2011-06-07 |
| 7928377 | Charged particle beam apparatus and sample manufacturing method | Tohru Ishitani, Tsuyoshi Ohnishi, Koichiro Takeuchi | 2011-04-19 |
| 7923701 | Charged particle beam equipment | Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Atsushi Takane +1 more | 2011-04-12 |
| 7888640 | Scanning electron microscope and method of imaging an object by using the scanning electron microscope | Ichiro Tachibana, Naomasa Suzuki | 2011-02-15 |
| 7875849 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2011-01-25 |
| 7838827 | Monochromator and scanning electron microscope using the same | Yoichi Ose, Shunroku Taya, Hideo Todokoro, Tadashi Otaka, Makoto Ezumi | 2010-11-23 |
| 7812310 | Charged particle beam apparatus and specimen holder | Hiroyuki Tanaka, Masashi Sasaki, Yoshifumi Taniguchi | 2010-10-12 |
| 7807966 | Scanning electron microscope | Hirohiko Kitsuki, Kazuo Aoki | 2010-10-05 |
| 7807980 | Charged particle beam apparatus and methods for capturing images using the same | Chie Shishido, Mayuka Oosaki, Hiroki Kawada, Tatsuya Maeda | 2010-10-05 |
| 7805023 | Image evaluation method and microscope | Tohru Ishitani, Hideo Todokoro, Tadashi Otaka, Takashi Iizumi, Atsushi Takane | 2010-09-28 |
| 7800059 | Method of forming a sample image and charged particle beam apparatus | Atsushi Takane, Takashi Iizumi, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more | 2010-09-21 |
| 7759652 | Electron lens and charged particle beam apparatus | Takashi Ohshima, Yutaka Kaneko, Souichi Katagiri, Koichiro Takeuchi | 2010-07-20 |
| 7745787 | Electron beam device | Chisato Kamiya, Masahiro Akatsu | 2010-06-29 |
| 7718976 | Charged particle beam apparatus | Takeshi Kawasaki, Makoto Ezumi, Tomonori Nakano | 2010-05-18 |
| 7714289 | Charged particle beam apparatus | Yuko Sasaki | 2010-05-11 |
| 7705303 | Defect inspection and charged particle beam apparatus | Toshihide Agemura | 2010-04-27 |
| 7655906 | Method and apparatus for scanning and measurement by electron beam | Zhaohui Cheng, Hiroshi Makino, Hikaru Koyama | 2010-02-02 |
| 7642514 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more | 2010-01-05 |
| 7633063 | Charged particle beam apparatus | Atsushi Takane, Satoru Yamaguchi | 2009-12-15 |
| 7615765 | Charged particle beam apparatus | Souichi Katagiri, Takashi Ohshima, Toshihide Agemura | 2009-11-10 |
| 7605381 | Charged particle beam alignment method and charged particle beam apparatus | Tadashi Otaka, Makoto Ezumi, Atsushi Takane, Shoji Yoshida, Satoru Yamaguchi +1 more | 2009-10-20 |
| 7582885 | Charged particle beam apparatus | Souichi Katagiri, Takashi Ohshima, Toshihide Agemura, Takashi Furukawa | 2009-09-01 |
| 7504626 | Scanning electron microscope and apparatus for detecting defect | Ichiro Tachibana, Atsuko Fukada, Naomasa Suzuki, Muneyuki Fukuda | 2009-03-17 |