MS

Mitsugu Sato

HH Hitachi High-Technologies: 76 patents #3 of 1,917Top 1%
HI Hitachi: 53 patents #249 of 28,497Top 1%
HS Hitachi Science Systems: 2 patents #12 of 77Top 20%
HC Hitachi Instruments Engineering Co.: 1 patents #18 of 126Top 15%
SO Sony: 1 patents #17,262 of 25,231Top 70%
Overall (All Time): #8,573 of 4,157,543Top 1%
129
Patents All Time

Issued Patents All Time

Showing 26–50 of 129 patents

Patent #TitleCo-InventorsDate
7973282 Charged particle beam apparatus and dimension measuring method Katsuhiko Sakai, Atsushi Takane, Yoshihiko Nakayama 2011-07-05
7964845 Charged particle beam device Yuusuke Tanba, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto +1 more 2011-06-21
7956324 Charged particle beam apparatus for forming a specimen image Noritsugu Takahashi, Muneyuki Fukuda, Hideo Todokoro 2011-06-07
7928377 Charged particle beam apparatus and sample manufacturing method Tohru Ishitani, Tsuyoshi Ohnishi, Koichiro Takeuchi 2011-04-19
7923701 Charged particle beam equipment Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Atsushi Takane +1 more 2011-04-12
7888640 Scanning electron microscope and method of imaging an object by using the scanning electron microscope Ichiro Tachibana, Naomasa Suzuki 2011-02-15
7875849 Electron beam apparatus and electron beam inspection method Muneyuki Fukuda, Tomoyasu Shojo, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana 2011-01-25
7838827 Monochromator and scanning electron microscope using the same Yoichi Ose, Shunroku Taya, Hideo Todokoro, Tadashi Otaka, Makoto Ezumi 2010-11-23
7812310 Charged particle beam apparatus and specimen holder Hiroyuki Tanaka, Masashi Sasaki, Yoshifumi Taniguchi 2010-10-12
7807966 Scanning electron microscope Hirohiko Kitsuki, Kazuo Aoki 2010-10-05
7807980 Charged particle beam apparatus and methods for capturing images using the same Chie Shishido, Mayuka Oosaki, Hiroki Kawada, Tatsuya Maeda 2010-10-05
7805023 Image evaluation method and microscope Tohru Ishitani, Hideo Todokoro, Tadashi Otaka, Takashi Iizumi, Atsushi Takane 2010-09-28
7800059 Method of forming a sample image and charged particle beam apparatus Atsushi Takane, Takashi Iizumi, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more 2010-09-21
7759652 Electron lens and charged particle beam apparatus Takashi Ohshima, Yutaka Kaneko, Souichi Katagiri, Koichiro Takeuchi 2010-07-20
7745787 Electron beam device Chisato Kamiya, Masahiro Akatsu 2010-06-29
7718976 Charged particle beam apparatus Takeshi Kawasaki, Makoto Ezumi, Tomonori Nakano 2010-05-18
7714289 Charged particle beam apparatus Yuko Sasaki 2010-05-11
7705303 Defect inspection and charged particle beam apparatus Toshihide Agemura 2010-04-27
7655906 Method and apparatus for scanning and measurement by electron beam Zhaohui Cheng, Hiroshi Makino, Hikaru Koyama 2010-02-02
7642514 Charged particle beam apparatus Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more 2010-01-05
7633063 Charged particle beam apparatus Atsushi Takane, Satoru Yamaguchi 2009-12-15
7615765 Charged particle beam apparatus Souichi Katagiri, Takashi Ohshima, Toshihide Agemura 2009-11-10
7605381 Charged particle beam alignment method and charged particle beam apparatus Tadashi Otaka, Makoto Ezumi, Atsushi Takane, Shoji Yoshida, Satoru Yamaguchi +1 more 2009-10-20
7582885 Charged particle beam apparatus Souichi Katagiri, Takashi Ohshima, Toshihide Agemura, Takashi Furukawa 2009-09-01
7504626 Scanning electron microscope and apparatus for detecting defect Ichiro Tachibana, Atsuko Fukada, Naomasa Suzuki, Muneyuki Fukuda 2009-03-17