Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7214936 | Charged particle beam apparatus and dimension measuring method | Mitsugu Sato, Katsuhiko Sakai, Yoshihiko Nakayama | 2007-05-08 |
| 7166840 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Satoru Yamaguchi, Osamu Komuro, Yasuhiko Ozawa, Hideo Todokoro | 2007-01-23 |
| 7164126 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Takashi Iizumi, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more | 2007-01-16 |
| 7109485 | Charged particle beam apparatus | Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2006-09-19 |
| 7078688 | Shape measuring device and shape measuring method | Masato Kazui, Mitsuji Ikeda | 2006-07-18 |
| 7034296 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Takashi Iizumi, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more | 2006-04-25 |
| 7026615 | Semiconductor inspection system | Haruo Yoda, Shoji Yoshida, Mitsuji Ikeda, Yasuhiko Ozawa | 2006-04-11 |
| 6963067 | Scanning electron microscope and sample observing method using it | Shuichi Takeuchi, Mine Nakagawa, Mitsugu Sato, Kazutaka Nimura | 2005-11-08 |
| 6936818 | Charged particle beam apparatus | Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2005-08-30 |
| 6872943 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor | Satoru Yamaguchi, Osamu Komuro, Yasuhiko Ozawa, Hideo Todokoro | 2005-03-29 |
| 6864493 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Tadashi Otaka, Makoto Ezumi, Shoji Yoshida, Satoru Yamaguchi +1 more | 2005-03-08 |
| 6756590 | Shape measurement method and apparatus | Masato Kazui, Mitsuji Ikeda | 2004-06-29 |
| 6653633 | Charged particle beam apparatus | Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-11-25 |
| 6538249 | Image-formation apparatus using charged particle beams under various focus conditions | Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-03-25 |
| 5391989 | Magnetic resonance imaging method and apparatus for imaging a fluid portion in a body | Munetaka Tsuda, Hideaki Koizumi | 1995-02-21 |
| 5355885 | Illuminating method and apparatus in nuclear magnetic resonance inspection | Munetaka Tsuda, Masao Yabusaki | 1994-10-18 |
| 5189369 | NMR imaging method of low flow rate fluid | Hideaki Koizumi, Koichi Sano | 1993-02-23 |
| 5148109 | Magnetic resonance imaging method and system therefor | Yoshiyuki Miyamoto, Ryuzaburo Takeda, Koichi Sano | 1992-09-15 |