Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894790 | Micropattern shape measuring system and method | Yasuhiro Mitsui, Yasutsugu Usami, Isao Kawata, Yuya Toyoshima, Nobuyuki Iriki | 2005-05-17 |
| 6864493 | Charged particle beam alignment method and charged particle beam apparatus | Mitsugu Sato, Makoto Ezumi, Atsushi Takane, Shoji Yoshida, Satoru Yamaguchi +1 more | 2005-03-08 |
| 6791084 | Method and scanning electron microscope for measuring dimension of material on sample | Goroku Shimoma, Mitsugu Sato, Hideo Todokoro, Shunichi Watanabe, Tadanori Takahashi +3 more | 2004-09-14 |
| 6667483 | Apparatus using charged particle beam | Atsushi Kobaru | 2003-12-23 |
| 6653634 | Method of measuring length with scanning type electron microscope | Kouichi Nagai | 2003-11-25 |
| 6274876 | Inspection apparatus and method using particle beam and the particle-beam-applied apparatus | Yoshimi Kawanami, Akio Yoneyama | 2001-08-14 |
| 6140644 | Inspection apparatus and method using a particle beam | Yoshimi Kawanami, Akio Yoneyama | 2000-10-31 |
| 6114695 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Fumio Mizuno, Satoru Yamada, Sadao Terakado +3 more | 2000-09-05 |
| 5969357 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Fumio Mizuno, Satoru Yamada, Sadao Terakado +3 more | 1999-10-19 |
| 5912462 | Electron microscope | Sho Takami | 1999-06-15 |
| 5866904 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Fumio Mizuno, Satoru Yamada, Sadao Terakado +3 more | 1999-02-02 |
| 5614713 | Scanning electron microscope | Atsushi Kobaru, Tatsuya Maeda, Katsuhiro Sasada | 1997-03-25 |
| 5598002 | Electron beam apparatus | Hideo Todokoro, Tatsuya Maeda, Katsuhiro Sasada | 1997-01-28 |
| 5594245 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Fumio Mizuno, Satoru Yamada, Sadao Terakado +3 more | 1997-01-14 |
| 5463221 | Electron beam measuring apparatus | Hiroyoshi Mori, Hideo Todokoro | 1995-10-31 |
| 5442183 | Charged particle beam apparatus including means for maintaining a vacuum seal | Hironobu Matsui, Mikio Ichihashi, Shinjiroo Ueda, Kazue Takahashi, Toshiaki Kobari +1 more | 1995-08-15 |
| 5412209 | Electron beam apparatus | Akimitsu Okura, Hiroshi Iwamoto, Hideo Todokoro, Tsutomu Komoda, Issei Tobita | 1995-05-02 |
| 5412210 | Scanning electron microscope and method for production of semiconductor device by using the same | Hideo Todokoro, Kenji Takamoto, Fumio Mizuno, Satoru Yamada, Katsuhiro Kuroda +2 more | 1995-05-02 |
| 5389787 | Scanning electron microscope | Hideo Todokoro | 1995-02-14 |
| 5387793 | Scanning electron microscope | Mitsugu Sato, Hideo Todokoro | 1995-02-07 |
| 5324950 | Charged particle beam apparatus | Mikio Ichihashi | 1994-06-28 |
| 5276325 | Scanning microscope and a method of operating such a scanning microscope | Hideo Todokoro, Osamu Yamada | 1994-01-04 |
| 5254856 | Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems | Hironobu Matsui, Mikio Ichihashi, Shinjiroo Ueda, Kazue Takahashi, Toshiaki Kobari +1 more | 1993-10-19 |
| D332616 | Electronic microscope | Kazunori Hashimoto, Minoru Shimizu | 1993-01-19 |
| 5149967 | Charged-particle beam apparatus | — | 1992-09-22 |