Issued Patents All Time
Showing 26–50 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7817860 | Method and apparatus for measuring dimension using electron microscope | Mayuka Iwasaki, Hiroki Kawada | 2010-10-19 |
| 7807980 | Charged particle beam apparatus and methods for capturing images using the same | Mayuka Oosaki, Mitsugu Sato, Hiroki Kawada, Tatsuya Maeda | 2010-10-05 |
| 7732761 | Method for measuring a pattern dimension using a scanning electron microscope | Maki Tanaka | 2010-06-08 |
| 7685560 | Method and apparatus for monitoring exposure process | Wataru Nagatomo, Hidetoshi Morokuma | 2010-03-23 |
| 7633061 | Method and apparatus for measuring pattern dimensions | Maki Tanaka, Wataru Nagatomo | 2009-12-15 |
| 7605364 | Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope | Mayuka Oosaki, Maki Tanaka, Hiroki Kawada | 2009-10-20 |
| 7512259 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Yuji Takagi +2 more | 2009-03-31 |
| 7476857 | Tool-to-tool matching control method and its system for scanning electron microscope | Mayuka Oosaki, Hiroki Kawada, Tatsuya Maeda | 2009-01-13 |
| 7476856 | Sample dimension-measuring method and charged particle beam apparatus | Kenji Watanabe, Tadashi Otaka, Ryo Nakagaki, Masakazu Takahashi, Yuya Toyoshima | 2009-01-13 |
| 7460714 | Method and apparatus for measuring dimension using electron microscope | Mayuka Iwasaki, Hiroki Kawada | 2008-12-02 |
| 7459712 | Method and apparatus of measuring pattern dimension and controlling semiconductor device process having an error revising unit | Maki Tanaka, Hidetoshi Morokuma, Yuji Takagi | 2008-12-02 |
| 7457453 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2008-11-25 |
| 7439504 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2008-10-21 |
| 7408155 | Measuring method and its apparatus | Mayuka Oosaki, Hiroki Kawada, Ryo Nakagaki | 2008-08-05 |
| 7408154 | Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes | Mayuka Oosaki, Hiroki Kawada, Tatsuya Maeda | 2008-08-05 |
| 7399964 | Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system | Ryo Nakagaki, Mayuka Oosaki, Hiroki Kawada | 2008-07-15 |
| 7335881 | Method of measuring dimensions of pattern | Maki Tanaka, Yuji Takagi | 2008-02-26 |
| 7274813 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Yuji Takagi +2 more | 2007-09-25 |
| 7269287 | Method and apparatus for measuring dimension using electron microscope | Mayuka Iwasaki, Hiroki Kawada | 2007-09-11 |
| 7269280 | Method and its apparatus for inspecting a pattern | Takashi Hiroi, Masahiro Watanabe, Maki Tanaka, Asahiro Kuni, Hiroshi Miyai +2 more | 2007-09-11 |
| 7266235 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2007-09-04 |
| 7263216 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Yuji Takagi, Shuji Maeda, Takanori Ninomiya, Takashi Hiroi, Masahiro Watanabe +1 more | 2007-08-28 |
| 7260256 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Hiroyuki Shinada +2 more | 2007-08-21 |
| 7230243 | Method and apparatus for measuring three-dimensional shape of specimen by using SEM | Maki Tanaka, Atsushi Miyamoto, Hidetoshi Morokuma, Mitsuji Ikeda, Yasutaka Toyoda | 2007-06-12 |
| 7230239 | Apparatus for inspecting three dimensional shape of a specimen and method of watching an etching process using the same | Maki Tanaka, Hidetoshi Morokuma, Yuji Takagi | 2007-06-12 |