Issued Patents All Time
Showing 76–82 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476388 | Scanning electron microscope having magnification switching control | Ryo Nakagaki, Yuji Takagi, Atsushi Shimoda, Kenji Obara, Yasuhiko Ozawa +4 more | 2002-11-05 |
| 6376854 | Method of inspecting a pattern on a substrate | Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka +8 more | 2002-04-23 |
| 6347150 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Hiroyuki Shinada +2 more | 2002-02-12 |
| 6236057 | Method of inspecting pattern and apparatus thereof with a differential brightness image detection | Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka +8 more | 2001-05-22 |
| 6169282 | Defect inspection method and apparatus therefor | Shunji Maeda, Kenji Oka, Hiroshi Makihira, Yasuhiko Nakayama, Minoru Yoshida +1 more | 2001-01-02 |
| 6087673 | Method of inspecting pattern and apparatus thereof | Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka +8 more | 2000-07-11 |
| 5763123 | Method for producing thin-film substrate | Yukio Matsuyama, Hiroya Hoshishiba, Haruhisa Sakamoto | 1998-06-09 |