Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7216311 | System and method for evaluating a semiconductor device pattern, method for controlling process of forming a semiconductor device pattern and method for monitoring a semiconductor device manufacturing process | Maki Tanaka, Ryo Nakagaki, Yuji Takagi | 2007-05-08 |
| 7173268 | Method of measuring pattern dimension and method of controlling semiconductor device process | Maki Tanaka, Hidetoshi Morokuma, Yuji Takagi | 2007-02-06 |
| 7166839 | Apparatus for measuring a three-dimensional shape | Maki Tanaka, Yuji Takagi | 2007-01-23 |
| 7164127 | Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same | Ryo Nakagaki, Hiroki Kawada, Mayuka Oosaki | 2007-01-16 |
| 7133550 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2006-11-07 |
| 7116816 | Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen | Maki Tanaka, Takashi Hiroi, Masahiro Watanabe, Hiroshi Morioka, Kenji Watanabe +2 more | 2006-10-03 |
| 6984589 | Method for determining etching process conditions and controlling etching process | Maki Tanaka, Yuji Takagi | 2006-01-10 |
| 6975754 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-12-13 |
| 6947587 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Yuji Takagi +2 more | 2005-09-20 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2005-09-06 |
| 6929892 | Method of monitoring an exposure process | Hidetoshi Morokuma, Yuki Ojima, Maki Tanaka, Wataru Nagatomo | 2005-08-16 |
| 6913861 | Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device | Osamu Komuro, Hidetoshi Morokuma, Ryo Nakagaki, Maki Tanaka, Yuuji Takagi | 2005-07-05 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Yuji Takagi, Masahiro Watanabe, Yasuhiro Yoshitake, Shunichi Matsumoto, Takashi Iizumi +3 more | 2005-06-21 |
| 6898305 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-05-24 |
| 6865288 | Pattern inspection method and apparatus | Masahiro Watanabe, Yuji Takagi, Hiroshi Miyai | 2005-03-08 |
| 6841403 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Minori Noguchi, Takafumi Okabe, Yuji Takagi | 2005-01-11 |
| 6831998 | Inspection system for circuit patterns and a method thereof | Hiroya Koshishiba, Hideaki Doi, Mitsunobu Isobe, Kazushi Yoshimura, Haruomi Kobayashi | 2004-12-14 |
| 6797526 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Minori Noguchi, Takafumi Okabe, Yuji Takagi | 2004-09-28 |
| 6791082 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Osamu Komuro, Hidetoshi Morokuma | 2004-09-14 |
| 6791096 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Osamu Komuro, Hidetoshi Morokuma | 2004-09-14 |
| 6756589 | Method for observing specimen and device therefor | Kenji Obara, Yuji Takagi, Atsushi Shimoda, Ryou Nakagaki, Seiji Isogai +3 more | 2004-06-29 |
| 6674890 | Defect inspection method and apparatus therefor | Shunji Maeda, Kenji Oka, Hiroshi Makihira, Yasuhiko Nakayama, Minoru Yoshida +1 more | 2004-01-06 |
| 6614022 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2003-09-02 |
| 6614923 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Yuji Takagi, Shuji Maeda, Takanori Ninomiya, Takashi Hiroi, Masahiro Watanabe +1 more | 2003-09-02 |
| 6587581 | Visual inspection method and apparatus therefor | Yukio Matsuyama, Yuji Takagi, Takashi Hiroi, Maki Tanaka, Asahiro Kuni +2 more | 2003-07-01 |