Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8153996 | Pattern forming apparatus and pattern forming method | Takayuki Abe, Hiroshi Nozue | 2012-04-10 |
| 7526352 | Semiconductor production system | Hidemitsu Naya, Shigeo Moriyama, Mutsumi Kikuchi, Kotaro Shimamura | 2009-04-28 |
| 7218985 | Semiconductor manufacturing apparatus | Hidemitsu Naya, Koji Hashimoto, Masamichi Kawano | 2007-05-15 |
| 7177718 | Semiconductor production system | Hidemitsu Naya | 2007-02-13 |
| 7099733 | Semiconductor production system | Hidemitsu Naya | 2006-08-29 |
| 7027888 | Semiconductor manufacturing apparatus | Hidemitsu Naya, Koji Hashimoto, Masamichi Kawano | 2006-04-11 |
| 6941186 | Semiconductor manufacturing apparatus | Hidemitsu Naya, Koji Hashimoto, Masamichi Kawano | 2005-09-06 |
| 6850854 | Semiconductor production system | Hidemitsu Naya, Shigeo Moriyama, Mutsumi Kikuchi, Kotaro Shimamura | 2005-02-01 |
| 6591207 | Semiconductor production system | Hidemitsu Naya, Shigeo Moriyama, Mutsumi Kikuchi, Kotaro Shimamura | 2003-07-08 |
| 5384466 | Electron beam lithography apparatus and a method thereof | Kazumitsu Nakamura | 1995-01-24 |