Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5766967 | Method for fabricating a submicron T-shaped gate | Yeong-Lin Lai, Hung-Ping D. Yang, Chun-Yen Chang, Edward Yi Chang, Rico Chang | 1998-06-16 |
| 5384466 | Electron beam lithography apparatus and a method thereof | Rikio Tomiyoshi | 1995-01-24 |
| 5168166 | Charged particle beam projection aligner having position detector using light beam | Hajime Hayakawa, Hiroyuki Itoh | 1992-12-01 |
| 5130550 | Electron beam lithography apparatus having device for correcting beam shape | Hideyuki Kakiuchi | 1992-07-14 |
| 5117111 | Electron beam measuring apparatus | Shinichi Kato, Yoshio Sakitani, Yoshihisa Minamikawa | 1992-05-26 |
| 4973849 | Electron beam lithography apparatus having external magnetic field correcting device | Yukio Yoshinari | 1990-11-27 |
| 4853549 | Electron beam drawing method | Akira Yanagisawa | 1989-08-01 |
| 4777369 | Electron beam lithographic method | Hiroyuki Ito | 1988-10-11 |
| 4433243 | Electron beam exposure apparatus | Masaru Miyazaki | 1984-02-21 |